Raman scattering of tetrahedrally-bonded amorphous carbon deposited at oblique angles

• Published in: Materials letters Vol. 41; no. 5; pp. 229 - 233
• Main Authors: Park, Minseo, Camphausen, S.M, Myers, A.F, Barletta, P.T, Sakhrani, V, Bergman, L, Nemanich, R.J, Cuomo, Jerome J
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 01.12.1999; Elsevier
• Subjects: Amorphous carbon; Amorphous semiconductors; glasses; Amorphous semiconductors; glasses; nanocrystalline materials; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Electron energy loss spectroscopy; Exact sciences and technology; Filtered arc depositors; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Molecular, atomic, ion, and chemical beam epitaxy; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of specific thin films; Physics; Raman scattering; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; 78.66.Jg; Filtered arc depositors; Amorphous carbon; Raman scattering; Electron energy loss spectroscopy; Thin films; Ion beam condensation; Raman spectra; EEL spectroscopy; Incidence angle; Amorphous state; Experimental study; Fabrication property relation; Carbon; TEM; Columnar structure
• ISSN: 0167-577X; 1873-4979
• DOI: 10.1016/S0167-577X(99)00135-4

Amorphous carbon (t x a-C 1− x ) films were prepared by filtered cathodic arc deposition (FCAD). The films were deposited on p-type Si (111). The angle of beam incidence was varied from 0° to 75° with respect to the substrate normal. Micro-Raman spectroscopy, electron energy loss spectroscopy (EELS), and transmission electron microscopy (TEM) were carried out for sample analysis. It was found that the position of the G peak shifts to a higher wave number region as the angle of incidence increases. This means that the sp 2/sp 3 ratio increases with increasing angle. This conclusion is supported by EELS. The film deposited at an angle of 75° exhibits a columnar structure with alternating high and low carbon density regions.