Interdigitated microelectrode arrays based on sputtered carbon thin-films

• Published in: Sensors and actuators. B, Chemical Vol. 35; no. 1; pp. 247 - 254
• Main Authors: Fiaccabrino, G.C, Tang, X.-M, Skinner, N, de Rooij, N.F, Koudelka-Hep, M
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Lausanne Elsevier B.V 01.09.1996; Amsterdam Elsevier; New York, NY
• Subjects: Carbon thin-films; Chemistry; Electrochemistry; Electrodes: preparations and properties; Exact sciences and technology; General and physical chemistry; Interdigitated microelectrode arrays; Microfabrication; Other electrodes; Sputtering; Carbon thin-films; Microfabrication; Sputtering; Interdigitated microelectrode arrays; Performance evaluation; Array; Silicon nitride; Carbon electrode; Microelectrode; Silicon; Manufacturing; Interdigital configuration; Radiofrequency sputtering; Thin film; Deposition process
• ISSN: 0925-4005; 1873-3077
• DOI: 10.1016/S0925-4005(97)80063-9

Thin-film carbon microelectrodes deposited by RF sputtering onto a Si/Si 3N 4 substrate are presented. By optimizing the deposition parameters, films showing low resistivity (10 −3 Ω cm) and good adhesion are achieved. Physical, spectroscopic and electrochemical characterizations are carried out. The electrocatalytical properties of the carbon thin-films are assessed with and without surface activation. Successful patterning in O 2 plasma is demonstrated by the fabrication of interdigitated microelectrode arrays featuring a resolution of 2 μm. The analytical performance of the interdigitated microelectrodes is illustrated by the detection of dopamine over a concentration range of 50 nM to 100 μM.