Compliant thermal microactuators

• Published in: Sensors and actuators. A, Physical Vol. 76; no. 1; pp. 463 - 469
• Main Authors: Jonsmann, Jacques, Sigmund, Ole, Bouwstra, Siebe
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Lausanne Elsevier B.V 30.08.1999; Elsevier Science
• Subjects: Applied sciences; Compliant; Cross-disciplinary physics: materials science; rheology; Design. Technologies. Operation analysis. Testing; Electrodeposition, electroplating; Electronics; Electroplating; Exact sciences and technology; Fast prototyping; General equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Integrated circuits; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Microactuators; Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology; Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing; Thermal; Thermal instruments, apparatus and techniques; Topology optimisation; Topology optimisation; Microactuators; Electroplating; Fast prototyping; Compliant; Thermal; Compliance; Thermal utilization; Electrodeposition; Rapid prototyping; Topology; Experimental study; Optimization
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/S0924-4247(99)00011-4

Two dimensional compliant metallic thermal microactuators are designed using topology optimisation, and microfabricated using rapid prototyping techniques. Structures are characterised using advanced image analysis, yielding a very high precision. Characterised structures behave in accordance with the intended behaviour.