Optical polarized reflectance characterization of thin aerogel and xerogel films

Advancement of porous dielectric materials like aerogels and xerogels for thin film devices demands sample characterization. Profilometers have been used to determine thickness, while the index of refraction and other optical properties are often determined using conventional ellipsometry. Commercia...

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Bibliographic Details
Published inJournal of non-crystalline solids Vol. 225; no. 1-3; pp. 19 - 23
Main Authors Hostetler, J.L, Stewart, D, Daitch, C.E, Ashley, C.S, Norris, P.M
Format Journal Article Conference Proceeding
LanguageEnglish
Published Amsterdam Elsevier B.V 01.04.1998
Elsevier
Subjects
Aerogel
Chemistry
Colloidal gels. Colloidal sols
Colloidal state and disperse state
Exact sciences and technology
General and physical chemistry
Optical polarized reflectance
Xerogel
Aerogel
E280
T200
Optical polarized reflectance
Xerogel
R150
O180
Dielectric materials
Optical properties
Optical method
Silicon Oxides
Measurement method
Experimental study
Layer thickness
Porous material
Thin film
Titanium Oxides
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Summary:Advancement of porous dielectric materials like aerogels and xerogels for thin film devices demands sample characterization. Profilometers have been used to determine thickness, while the index of refraction and other optical properties are often determined using conventional ellipsometry. Commercial ellipsometers can be unreliable due to the low surface reflectivity (<1%) of aerogel and xerogel films. A simple interferometric method, termed the polarized reflectance technique for thickness and index, is used to simultaneously measure the index of refraction and thickness of thin aerogel and xerogel films of SiO 2, TiO 2, ZrO 2, and composite materials with an accuracy of ±0.5%.
ISSN:0022-3093
1873-4812
DOI:10.1016/S0022-3093(98)00004-0