New stable 10 pF gas-dielectric capacitors

10 pF gas-dielectric capacitors made of fused silica doped with titanium oxide have been developed. The capacitance was defined by the critical dimensions of the electrodes in a monolithic structure. The characteristics of the capacitors were found to show a temperature coefficient of -1.8/spl times...

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Bibliographic Details
Published inIEEE transactions on instrumentation and measurement Vol. 50; no. 2; pp. 294 - 297
Main Authors Rae Duk Lee, Han Jun Kim, Semenov, Yu.P.
Format Journal Article
LanguageEnglish
Published New York IEEE 01.04.2001
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Capacitance
Capacitors
Deviation
Dielectric substrates
Dissipation factor
Electrodes
Fused silica
Hysteresis
Instrumentation
Silicon compounds
Stability
Standards development
Temperature
Thermal expansion
Titanium
Titanium oxides
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Summary:10 pF gas-dielectric capacitors made of fused silica doped with titanium oxide have been developed. The capacitance was defined by the critical dimensions of the electrodes in a monolithic structure. The characteristics of the capacitors were found to show a temperature coefficient of -1.8/spl times/10/sup -7//K, with a deviation from the nominal value of a few parts in 10/sup 6/ and a dissipation factor of less than 3/spl times/10/sup -7/. Their long-term stability is expected to be in the order of one part in 10/sup 8/.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0018-9456
1557-9662
DOI:10.1109/19.918125