Deposition of diamond from plasma jets with chlorobenzenes as carbon source
The diamond deposition on a molybdenum substrate was examined in an ArH 2 DC plasma jet adding C 6H 5Cl, C 6H 4Cl 2 and C 6H 3Cl 3 as the carbon sources, compared with adding C 6H 6 to to examine the effect of chlorine species on diamond deposition. Well-faceted high-quality diamond was formed from...
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Published in | Diamond and related materials Vol. 6; no. 12; pp. 1874 - 1882 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Amsterdam
Elsevier B.V
01.12.1997
Elsevier |
Subjects | |
Online Access | Get full text |
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Summary: | The diamond deposition on a molybdenum substrate was examined in an ArH
2 DC plasma jet adding C
6H
5Cl, C
6H
4Cl
2 and C
6H
3Cl
3 as the carbon sources, compared with adding C
6H
6 to to examine the effect of chlorine species on diamond deposition. Well-faceted high-quality diamond was formed from the ArC
6H
4Cl
2H
2 plasma jet. A small amount of graphite and/or amorphous carbon were identified on the surface of the deposits from other plasma jets. Hydrogen abstraction of surface-adsorbed chlorine, chlorine abstraction of surface-adsorbed hydrogen and/or dehydrochlorination play a dominant role in providing higher diamond deposition rates and the removal of graphite and/or amorphous carbon. Excess amounts of chlorine, however, seem to foster the deposition of non-diamond carbon phase. |
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ISSN: | 0925-9635 1879-0062 |
DOI: | 10.1016/S0925-9635(97)00154-4 |