Deposition of diamond from plasma jets with chlorobenzenes as carbon source

• Published in: Diamond and related materials Vol. 6; no. 12; pp. 1874 - 1882
• Main Authors: Horii, Noritaka, Suzuki, Naohito, Itoh, Ken-ichi, Kotaki, Toshiro, Matsumoto, Osamu
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 01.12.1997; Elsevier
• Subjects: Adsorption anabstraction of chlorine; Chlorobenzenes; Cross-disciplinary physics: materials science; rheology; D.C. Plasma jet; Diamond crystal growth; Exact sciences and technology; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; D.C. Plasma jet; Diamond crystal growth; Chlorobenzenes; Adsorption anabstraction of chlorine; Plasma jets; Plasma diagnostics; Films; Synthetic mineral; Emission spectra; Nonmetals; Chlorocarbon; Diamonds; Crystal growth from vapors; Experimental study; Precursor; Optical spectrum
• ISSN: 0925-9635; 1879-0062
• DOI: 10.1016/S0925-9635(97)00154-4

The diamond deposition on a molybdenum substrate was examined in an ArH 2 DC plasma jet adding C 6H 5Cl, C 6H 4Cl 2 and C 6H 3Cl 3 as the carbon sources, compared with adding C 6H 6 to to examine the effect of chlorine species on diamond deposition. Well-faceted high-quality diamond was formed from the ArC 6H 4Cl 2H 2 plasma jet. A small amount of graphite and/or amorphous carbon were identified on the surface of the deposits from other plasma jets. Hydrogen abstraction of surface-adsorbed chlorine, chlorine abstraction of surface-adsorbed hydrogen and/or dehydrochlorination play a dominant role in providing higher diamond deposition rates and the removal of graphite and/or amorphous carbon. Excess amounts of chlorine, however, seem to foster the deposition of non-diamond carbon phase.