Formation properties of the main-discharge in pure Ar gas using the automatically preionized plasma electrode

In order to develop the discharge-pumped Ar/sub 2//sup */ excimer laser, images of discharge properties in relatively low-pressure (1/spl sim/5 atm) pure Ar gas were obtained using the automatically preionized (API) plasma electrode. The API plasma electrode has a rod-type preionization electrode co...

Full description

Saved in:
Bibliographic Details
Published inIEEE transactions on plasma science Vol. 33; no. 2; pp. 324 - 325
Main Authors Sung Ki Hong, Hayashi, N., Ihara, S., Satoh, S., Yamabe, C.
Format Journal Article
LanguageEnglish
Published New York IEEE 01.04.2005
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
API
Argon
Capacitance
Cathodes
Ceramics
Dielectrics
Discharge
Electric discharge pumping
Electrodes
Laser stability
Pipe
Plasma
Plasma electrodes
Plasma properties
Plasma stability
preionization
Surface discharges
Online AccessGet full text

Cover

More Information
Summary:In order to develop the discharge-pumped Ar/sub 2//sup */ excimer laser, images of discharge properties in relatively low-pressure (1/spl sim/5 atm) pure Ar gas were obtained using the automatically preionized (API) plasma electrode. The API plasma electrode has a rod-type preionization electrode covered with a ceramic pipe as dielectric and is 74 cm long. The effect of the dielectric capacitance of the ceramic pipe on the API plasma electrode is determined.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2005.845926