Laser patterning of YBaCuO weak link bridges

A laser ablation process was developed to pattern thin-film superconducting devices with 1- mu m resolution. The process was utilized to fabricate bridge structures in high T/sub c/(>90 K) YBaCuO superconducting thin films sputtered on various substrates. For bridges patterned on thin films with...

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Bibliographic Details
Published inIEEE transactions on magnetics Vol. 25; no. 2; pp. 935 - 938
Main Authors Wiener-Avnear, E., Cooper, J.E., Kerber, G.L., Spargo, J.W., Toth, A.G., Josefowicz, J.Y., Rensch, D.B., Clemens, B.M., Hunter, A.T.
Format Journal Article
LanguageEnglish
Published IEEE 01.03.1989
Subjects
Bridges
Laser ablation
Power lasers
Sputtering
Substrates
Superconducting devices
Superconducting thin films
Thin film devices
Tunneling
Yttrium barium copper oxide
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Summary:A laser ablation process was developed to pattern thin-film superconducting devices with 1- mu m resolution. The process was utilized to fabricate bridge structures in high T/sub c/(>90 K) YBaCuO superconducting thin films sputtered on various substrates. For bridges patterned on thin films with a high degree of polycrystallinity, the authors observed weak-link Josephson behaviour, from 4.2 K up to T/sub c/. The weak-link behaviour was attributed to grain-boundary superconducting tunneling. The results suggest that direct laser patterning can be a powerful technique for evaluation and optimization of prototype superconducting devices.< >
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ISSN:0018-9464
1941-0069
DOI:10.1109/20.92441