Simple and Cost-Effective Method for Edge Bead Removal by Using a Taping Method

• Published in: Journal of the Korean Physical Society Vol. 73; no. 10; pp. 1473 - 1478
• Main Authors: Park, Hyeoung Woo, Kim, H. J., Roh, Ji Hyoung, Choi, Jong-Kyun, Cha, Kyoung-Rae
• Format: Journal Article
• Language: English
• Published: Seoul The Korean Physical Society 01.11.2018; Springer Nature B.V; 한국물리학회
• Subjects: Air gaps; Beads; Mathematical and Computational Physics; Organic chemistry; Particle and Nuclear Physics; Photoresists; Physics; Physics and Astronomy; Substrates; Taping; Theoretical; 물리학; Spin coating; Edge bead; MEMS
• ISSN: 0374-4884; 1976-8524
• DOI: 10.3938/jkps.73.1473

In this study, we have developed a simple and cost-effective method to prevent edge bead formation by covering the edge of a chip-level substrate with heat-resistant tape during patterning using SU-8. Edge beads are a fundamental problem in photoresists and are particularly notable in high-viscosity fluids and thick coatings. Edge beads can give rise to an air gap between the substrate and the patterning mask during UV exposure, which results in non-uniform patterns. Furthermore, the sample may break since the edge bead is in contact with the mask. In particular, the SU-8 coating thickness of the chip-level substrates used in MEMS or BioMEMS may not be properly controlled because of the presence of edge beads. The proposed method to solve the edge bead problem can be easily and economically utilized without the need for a special device or chemicals. This method is simple and prevents edge bead formation on the sample substrate. Despite the small loss in the taping area, the uniformity of the SU-8 coating is improved from 50.9% to 5.6%.