Impact of UV/ozone surface treatment on AlGaN/GaN HEMTs

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Bibliographic Details
Published inJournal of semiconductors Vol. 30; no. 12; p. 124001
Main Authors Tingting, Yuan, Xinyu, Liu, Yingkui, Zheng, Chengzhan, Li, Ke, Wei, Guoguo, Liu
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.12.2009
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ISSN:1674-4926
DOI:10.1088/1674-4926/30/12/124001