Nucleation and interface formation in thin films

In this paper we present the results of an experimental investigation into the nucleation and growth of ion-plated films. Transmission electron microscopy was used to study the nucleation of ultrathin silver films (10–400 Å thick) deposited on carbon films about 50 Å thick. Test results reveal that...

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Bibliographic Details
Published inThin solid films Vol. 75; no. 1; pp. 29 - 36
Main Authors Shawki, G.S.A., El-Sherbiny, M.G., Salem, F.B.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.01.1981
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Summary:In this paper we present the results of an experimental investigation into the nucleation and growth of ion-plated films. Transmission electron microscopy was used to study the nucleation of ultrathin silver films (10–400 Å thick) deposited on carbon films about 50 Å thick. Test results reveal that the formation of the ion-plated films is dominated either by direct deposition onto previously implanted nuclei or by the formation of new nuclei. The effect of ion implantation is to minimize the now well-known liquid-like behaviour of the deposited films. Furthermore, continuous ion-plated films can be produced with lower thicknesses than continuous films conventionally deposited in a vacuum.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(81)90389-8