Non-additive effects in secondary-ion emission from V, Nb and Ta under gold-cluster bombardment

Comparative studies of the emission of secondary cluster ions in sputtering of the V group metals (V, Nb, Ta) by Au m − ( m=1–9) molecular ions with energies of 6–21 keV have been carried out. For all the metals, a strong non-additive increase in the yield of the secondary ions under cluster bombard...

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Published inApplied surface science Vol. 231; pp. 78 - 81
Main Authors Morozov, S.N., Rasulev, U.Kh
Format Journal Article
LanguageEnglish
Published Elsevier B.V 15.06.2004
Subjects
Cluster
Emission
Sputtering
Thermal spikes
Emission
Cluster
Sputtering
Thermal spikes
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Summary:Comparative studies of the emission of secondary cluster ions in sputtering of the V group metals (V, Nb, Ta) by Au m − ( m=1–9) molecular ions with energies of 6–21 keV have been carried out. For all the metals, a strong non-additive increase in the yield of the secondary ions under cluster bombardment is observed. The non-additivity coefficients K mm′ increase with the raise of the number of atoms n in the sputtered cluster ions reaching the values of 70–150 for K 31 with n=10–12. The raise in the yield of atomic V +, Nb +, Ta + ions with quasi-thermal energy has been found with the increase in the number of atoms in the bombarding Au m − ions.
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ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2004.03.038