Non-additive effects in secondary-ion emission from V, Nb and Ta under gold-cluster bombardment
Comparative studies of the emission of secondary cluster ions in sputtering of the V group metals (V, Nb, Ta) by Au m − ( m=1–9) molecular ions with energies of 6–21 keV have been carried out. For all the metals, a strong non-additive increase in the yield of the secondary ions under cluster bombard...
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Published in | Applied surface science Vol. 231; pp. 78 - 81 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
15.06.2004
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Subjects | |
Online Access | Get full text |
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Summary: | Comparative studies of the emission of secondary cluster ions in sputtering of the V group metals (V, Nb, Ta) by Au
m
− (
m=1–9) molecular ions with energies of 6–21
keV have been carried out. For all the metals, a strong non-additive increase in the yield of the secondary ions under cluster bombardment is observed. The non-additivity coefficients
K
mm′
increase with the raise of the number of atoms
n in the sputtered cluster ions reaching the values of 70–150 for
K
31 with
n=10–12. The raise in the yield of atomic V
+, Nb
+, Ta
+ ions with quasi-thermal energy has been found with the increase in the number of atoms in the bombarding Au
m
− ions. |
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Bibliography: | SourceType-Scholarly Journals-2 ObjectType-Feature-2 ObjectType-Conference Paper-1 content type line 23 SourceType-Conference Papers & Proceedings-1 ObjectType-Article-3 |
ISSN: | 0169-4332 1873-5584 |
DOI: | 10.1016/j.apsusc.2004.03.038 |