Grating Profile Reconstruction Based on Finite Elements and Optimization Techniques
We consider the inverse diffraction problem to recover a two-dimensional periodic structure from scattered waves measured above and beneath the structure. The task is reformulated in the form of an optimization problem including special regularization terms. The solvability and the dependence on the...
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Published in | SIAM journal on applied mathematics Vol. 64; no. 2; pp. 525 - 545 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Philadelphia
Society for Industrial and Applied Mathematics
2004
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Subjects | |
Online Access | Get full text |
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Summary: | We consider the inverse diffraction problem to recover a two-dimensional periodic structure from scattered waves measured above and beneath the structure. The task is reformulated in the form of an optimization problem including special regularization terms. The solvability and the dependence on the parameter of regularization is analyzed. Numerical results for synthetic data demonstrate the practicability of the inversion algorithm. |
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ISSN: | 0036-1399 1095-712X |
DOI: | 10.1137/S0036139902420018 |