Grating Profile Reconstruction Based on Finite Elements and Optimization Techniques

We consider the inverse diffraction problem to recover a two-dimensional periodic structure from scattered waves measured above and beneath the structure. The task is reformulated in the form of an optimization problem including special regularization terms. The solvability and the dependence on the...

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Bibliographic Details
Published inSIAM journal on applied mathematics Vol. 64; no. 2; pp. 525 - 545
Main Authors J. Elschner, Hsiao, G. C., Rathsfeld, A.
Format Journal Article
LanguageEnglish
Published Philadelphia Society for Industrial and Applied Mathematics 2004
Subjects
Algorithms
Angle of incidence
Coefficients
Conjugate gradient method
Electromagnetism
Finite element method
Fourier coefficients
Helmholtz equations
Inverse problems
Inverse scattering
Optimization techniques
Uniqueness
Wave diffraction
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Summary:We consider the inverse diffraction problem to recover a two-dimensional periodic structure from scattered waves measured above and beneath the structure. The task is reformulated in the form of an optimization problem including special regularization terms. The solvability and the dependence on the parameter of regularization is analyzed. Numerical results for synthetic data demonstrate the practicability of the inversion algorithm.
ISSN:0036-1399
1095-712X
DOI:10.1137/S0036139902420018