Plasma Enhanced Chemical Vapor Deposition synthesis of graphene-like structures from plasma state of CO2 gas

The Plasma Enhanced Chemical Vapor Deposition synthesis of graphene-like vertical structures from the plasma state of CO2 gas on various catalyst-free substrates is experimentally studied. A peculiarity of the synthesis conditions is the ability to control a plasma density in the synthesis region to...

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Bibliographic Details
Published inCarbon (New York) Vol. 167; pp. 132 - 139
Main Authors Svavil’nyi, M.Ye, Panarin, V.Ye, Shkola, A.A., Nikolenko, A.S., Strelchuk, V.V.
Format Journal Article
LanguageEnglish
Published New York Elsevier Ltd 15.10.2020
Elsevier BV
Subjects
Aromatic compounds
Carbon dioxide
Chemical synthesis
Chemical vapor deposition
Graphene
Nucleation
Plasma density
Plasma enhanced chemical vapor deposition
Plasma physics
Stability
Substrates
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Summary:The Plasma Enhanced Chemical Vapor Deposition synthesis of graphene-like vertical structures from the plasma state of CO2 gas on various catalyst-free substrates is experimentally studied. A peculiarity of the synthesis conditions is the ability to control a plasma density in the synthesis region to very low values. The physical processes taking place on substrates, as well as models for the nucleation of primary aromatic rings and further growth of the formed graphene structures are considered. [Display omitted]
ISSN:0008-6223
1873-3891
DOI:10.1016/j.carbon.2020.05.057