Effects of hydrogen radical treatment on piezoresistance coefficients of germanium

Abstract We investigate the effects of hydrogen radical treatment on piezoresistance coefficients of germanium under uniaxial stress up to ±500 μ strain over the temperature range −30 °C to 25 °C. Hydrogen radicals are produced by hydrogen gas (99.99%, 2.7 kPa) on a hot tungsten catalyst (1800 °C)....

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Published inApplied physics express Vol. 16; no. 4; pp. 41003 - 41006
Main Authors Matsuda, Kazunori, Yamamoto, Masashi, Mikawa, Michio, Nagaoka, Shiro, Mori, Nobuya, Tsutsui, Kazuo
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.04.2023
Subjects
germanium
piezoresistance
strain
vacancy
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Summary:Abstract We investigate the effects of hydrogen radical treatment on piezoresistance coefficients of germanium under uniaxial stress up to ±500 μ strain over the temperature range −30 °C to 25 °C. Hydrogen radicals are produced by hydrogen gas (99.99%, 2.7 kPa) on a hot tungsten catalyst (1800 °C). The gauge factor and majority carrier on non-dope germanium dramatically changed from n - to p -type after the hydrogen radical treatment. The results suggest that the piezoresistance coefficients of germanium are seriously affected by vacancy-related levels around the midgap, which behave as donors or acceptors depending on the Fermi level and are passivated by the hydrogen radicals.
Bibliography:APEX-106983.R1
ISSN:1882-0778
1882-0786
DOI:10.35848/1882-0786/acc8b4