Characterization of thin gold layers on polyethyleneterephthalate: transition from discontinuous to continuous, homogenous layer

Gold layers of increasing thicknesses were prepared on a polyethyleneterephthalate substrate by sputtering. The continuity of a gold layer, as a function of the sputtering time, was examined using electron microscopy and by measuring its electrical resistance and the reflection of electromagnetic mi...

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Bibliographic Details
Published inApplied physics. A, Materials science & processing Vol. 75; no. 4; pp. 541 - 544
Main Authors Svorcik, V., Zehentner, J., Rybka, V., Slepicka, P., Hnatowicz, V.
Format Journal Article
LanguageEnglish
Published 01.10.2002
Subjects
Continuity
Gold
Microwaves
Profilometers
Reflection
Spectra
Sputtering
Thin films
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Summary:Gold layers of increasing thicknesses were prepared on a polyethyleneterephthalate substrate by sputtering. The continuity of a gold layer, as a function of the sputtering time, was examined using electron microscopy and by measuring its electrical resistance and the reflection of electromagnetic microwaves. The mean layer thickness was determined from UV-VIS spectra as well as from atomic absorption spectroscopy measurements of gold removed from a defined sample area. Layer thicknesses above 20 nm were also determined by a profilometer. These techniques enables one to characterize a transition of the gold layer from a discontinuous one, through a continuous but inhomogeneous (thickness) one to a continuous and homogenous one.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
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ISSN:0947-8396
1432-0630
DOI:10.1007/s003390101024