Nonlinear processes of probe formation of a beam with inhomogeneous phase density at nuclear microprobe

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 269; no. 20; pp. 2197 - 2201
• Main Authors: Ponomarev, A.G., Ponomarov, A.A., Miroshnichenko, V.I.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 15.10.2011
• Subjects: Aberration; Allowances; Beams (radiation); Density; Density in phase space; Ion distribution; Nonlinearity; Nuclear microprobe; Probe-forming system; Quadrupole lens; Quadrupoles; Resolution; Space probes; Probe-forming system; Quadrupole lens; Nuclear microprobe; Density in phase space; Resolution
• ISSN: 0168-583X; 1872-9584
• DOI: 10.1016/j.nimb.2011.02.022

The work describes nonlinear processes of probe formation on the target with allowance for an inhomogeneous density of ion distribution in phase space in the object collimator plane taken from experimental data. The chromatic aberrations, intrinsic aberrations of the 3rd order and parasitic aberrations caused by sextupole and octupole components of the magnetic quadrupole lens field have been taken into account in the object-target phase coordinate transformation. The criterion of obtaining the optimal resolution was defined as the minimum spot size (FWHM) for a fixed ratio IFWHM/I0 of beam current in this spot to the total beam current. The conditions for which the initial density of ion distribution in phase space is matched with the ion-optical characteristics of the probe-forming system were considered. The influence of axial brightness and parasitic sextupole and octupole field components on the beam current distribution at the target has been determined.