A novel low temperature integration of hybrid CMOS devices on flexible substrates
In this work we demonstrate a novel integration approach to fabricate CMOS circuits on plastic substrates (poly-ethylene naphthalate, PEN). We use pentacene and amorphous silicon (a-Si:H) thin-film transistors (TFTs) as p-channel and n-channel devices, respectively. The maximum processing temperatur...
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Published in | Organic electronics Vol. 10; no. 7; pp. 1217 - 1222 |
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Main Authors | , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Amsterdam
Elsevier B.V
01.11.2009
Elsevier |
Subjects | |
Online Access | Get full text |
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