Probe characterization for scanning probe metrology

Precision probe metrology requires that the probe be carefully formed and measured. We demonstrate a method to accurately measure the shape of a probe in situ by scanning special measurement structures.

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Bibliographic Details
Published inUltramicroscopy Vol. 42; no. B; pp. 1616 - 1620
Main Authors Grigg, D.A., Russell, P.E., Griffith, J.E., Vasile, M.J., Fitzgerald, E.A.
Format Journal Article Conference Proceeding
LanguageEnglish
Published Amsterdam Elsevier B.V 01.07.1992
Elsevier Science
Subjects
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Other topics in instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Scanning tunneling microscopy
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Summary:Precision probe metrology requires that the probe be carefully formed and measured. We demonstrate a method to accurately measure the shape of a probe in situ by scanning special measurement structures.
ISSN:0304-3991
1879-2723
DOI:10.1016/0304-3991(92)90494-5