Conducting luminescent ZnS films formed by plasma-assisted metal-organic chemical vapour deposition

• Published in: Thin solid films Vol. 162; pp. 263 - 271
• Main Authors: Patel, N.G., Fischer, A.G.
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 01.08.1988; Elsevier Science
• Subjects: Condensed matter: structure, mechanical and thermal properties; Exact sciences and technology; Physics; Solid surfaces and solid-solid interfaces; Surface and interface dynamics and vibrations; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; Crystal growth; Plasma; Conducting material; Transition metal Compounds; Polycrystal; Organometallic compound; Luminescent material; Zinc Sulfides; Chemical vapor deposition; Inorganic compound; Thin film
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/0040-6090(88)90214-3

Polycrystalline ZnS films of micrometre thickness were grown on 50 mm diameter soda-lime glass substrates at 623 K at about 10 3 Pa pressure by epitaxial pyrolysis of diethyl zinc and hydrogen sulphide gas mixtures without premature reaction using a simplified plasma-assisted metal-organic chemical vapour deposition apparatus employing only a gas ballast forepump and a Tesla spark tester. The reaction rate was strongly increased by a gas discharge. The films became strongly n type on doping with aluminium from added trimethyl aluminium vapour. The blue photoluminescence of the films was impaired by their contamination with chromium (ascertained by electron paramagnetic resonance) from the stainless steel vessel and tubing employed.