Development and testing of a high temperature quartz crystal microbalance

A high temperature quartz crystal microbalance (HTQCM) was developed in order to extend its application range up to the Curie point (573 °C) of the quartz resonators. It is shown that well matched quartz crystal resonators and even better, a dual resonator working in a differential measuring system,...

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Bibliographic Details
Published inVacuum Vol. 46; no. 7; pp. 691 - 694
Main Authors Mecea, V.M., Carlsson, J.O., Heszler, P, Bârtan, M
Format Journal Article
LanguageEnglish
Published Oxford Elsevier Ltd 01.07.1995
Elsevier
Subjects
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
Curie point
Stability
Process control
High temperature
Experimental study
Quartz resonator
Optimization
Quartz microbalance
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Summary:A high temperature quartz crystal microbalance (HTQCM) was developed in order to extend its application range up to the Curie point (573 °C) of the quartz resonators. It is shown that well matched quartz crystal resonators and even better, a dual resonator working in a differential measuring system, can minimize the temperature effect on the measuring signal, allowing mass measurements with an accuracy of 2 × 10 −12 g cm −2 s −1. The HTQCM was tested by measuring the sublimation rates of C 60 fullerene in a temperature range of 250 °C to 360 °C. In addition, the HTQCM was successfully tested during laser induced carbon deposition at a substrate temperature of up to 500 °C.
ISSN:0042-207X
1879-2715
DOI:10.1016/0042-207X(94)00147-2