Surface-related optical anisotropy of GaInP, InP, and GaP
We have studied the optical anisotropy induced by the (0 0 1) surface reconstruction of GaInP, InP, and GaP annealed under various gas environments in an atmospheric-pressure metal-organic chemical vapor deposition system using reflectance difference spectroscopy (RDS). The RD spectra of InP under a...
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Published in | Journal of crystal growth Vol. 174; no. 1; pp. 558 - 563 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
United States
Elsevier B.V
1997
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Subjects | |
Online Access | Get full text |
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Summary: | We have studied the optical anisotropy induced by the (0 0 1) surface reconstruction of GaInP, InP, and GaP annealed under various gas environments in an atmospheric-pressure metal-organic chemical vapor deposition system using reflectance difference spectroscopy (RDS). The RD spectra of InP under a PH
3 partial pressure of 10 Torr in a carrier of H
2 between 500°C and 400°C are consistent with a (2 × 1) surface reconstruction. As the temperature of the InP is lowered to 200°C under PH
3, the signature of the RD spectrum changes. If the flow of PH
3 is removed when the InP cools to 300°C, the RD spectrum remains consistent with the (2 × 1) surface reconstruction down to room temperature. When InP is annealed at 400°C in hydrogen, the RD spectrum becomes consistent with a (2 × 4) surface reconstruction. The temperature-dependent RD spectra of GaInP are very similar to those of InP. The RD spectra of GaP reveal that the P-terminated surface of GaP observed at high temperatures is more stable then either InP or GaInP surfaces in the absence of PH
3. The features of these surface-related RD spectra are quickly quenched in air and, under some conditions, nitrogen. This observation is important for studies of bulk-related, ordering-induced optical anisotropy in GaInP. |
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Bibliography: | USDOE AC36-99-GO10337 |
ISSN: | 0022-0248 1873-5002 |
DOI: | 10.1016/S0022-0248(97)00041-9 |