Instrumentation and analog implementation of the Q- C method for MOS measurements

The instrumentation required to implement the Q- C (charge-capacitance) method and the effects of parasitics are described. Accurate results with the Q- C method critically depend on controlling and properly accounting for these parasitics. Also described are analog computer circuits for calculating...

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Bibliographic Details
Published inSolid-state electronics Vol. 27; no. 11; pp. 953 - 962
Main Authors Nicollian, E.H., Brews, J.R.
Format Journal Article
LanguageEnglish
Published Oxford Elsevier Ltd 01.01.1984
Elsevier Science
Subjects
Applied sciences
Electronics
Exact sciences and technology
Interfaces
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Measuring instrument
Measurement
MOS structure
Capacitance
MOS capacity
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Summary:The instrumentation required to implement the Q- C (charge-capacitance) method and the effects of parasitics are described. Accurate results with the Q- C method critically depend on controlling and properly accounting for these parasitics. Also described are analog computer circuits for calculating band bending vs gate voltage, and doping profile from the measured quantities.
ISSN:0038-1101
1879-2405
DOI:10.1016/0038-1101(84)90069-8