Cross-sectional transmission electron microscopy studies of metallic multilayers

• Published in: Ultramicroscopy Vol. 51; no. 1; pp. 306 - 315
• Main Authors: De Veirman, A.E.M., Hakkens, F.J.G., Dirks, A.G.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 01.06.1993; Elsevier Science
• Subjects: Applied sciences; Condensed matter: structure, mechanical and thermal properties; Electron, ion, and scanning probe microscopy; Exact sciences and technology; Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties; Metals. Metallurgy; Physics; Structure of solids and liquids; crystallography; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Transmission, reflection and scanning electron microscopy(including ebic); Epitaxial layers; Modulated materials; Roughness; Solid-solid interfaces; Experimental study; High-resolution methods; Columnar structure; Thin films; Multilayers; Transition elements; Chemical composition; Microstructure; TEM; Lattice image
• ISSN: 0304-3991; 1879-2723
• DOI: 10.1016/0304-3991(93)90156-R

The contribution of transmission electron microscopy, both conventional and high resolution, to the study of compositionally modulated netallic multilayers (Fe/V and Co/Me with Me = Au, Cu or Pd) is illustrated. Different growth aspects are discussed with special emphasis on the interference of the microstructure, which usually is columnar, with the artificial composition modulation. The occurrence of layer curvature and interface roughness and the degree of coherence is addressed as well. Where possible, the effect of the multilayer microstructure on the film properties is discussed.