Monolithic and Two-Dimensional Integration of Silicon Photonic Microdisks With Microelectronics

A low-power silicon photonic disk resonator is monolithically and two-dimensionally integrated with complementary metal-oxide-semiconductor (CMOS) electronics. The results show direct integration with established CMOS manufacturing lines without changing either the CMOS or the photonic process stack...

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Published inIEEE photonics journal Vol. 4; no. 1; pp. 242 - 249
Main Authors Zortman, W. A., Trotter, D. C., Lentine, A. L., Robertson, G., Hsia, A., Watts, M. R.
Format Journal Article
LanguageEnglish
Published IEEE 01.02.2012
Subjects
2-D integration
Bit error rate
CMOS
CMOS integrated circuits
Inverters
Modulation
monolithic integration
Performance evaluation
Photonics
Silicon
silicon photonic devices
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Abstract A low-power silicon photonic disk resonator is monolithically and two-dimensionally integrated with complementary metal-oxide-semiconductor (CMOS) electronics. The results show direct integration with established CMOS manufacturing lines without changing either the CMOS or the photonic process stack. Comparable results for each integration method show subpicojoule per bit modulation and the potential for further reductions. The analysis reveals that the process of integration does not limit the performance of photonic or electronic components, and clear steps to use smaller drivers to achieve sub-50 fJ/bit at 10 Gb/s operation are available.
AbstractList A low-power silicon photonic disk resonator is monolithically and two-dimensionally integrated with complementary metal-oxide-semiconductor (CMOS) electronics. The results show direct integration with established CMOS manufacturing lines without changing either the CMOS or the photonic process stack. Comparable results for each integration method show subpicojoule per bit modulation and the potential for further reductions. The analysis reveals that the process of integration does not limit the performance of photonic or electronic components, and clear steps to use smaller drivers to achieve sub-50 fJ/bit at 10 Gb/s operation are available.
Author Zortman, W. A.
Watts, M. R.
Lentine, A. L.
Trotter, D. C.
Robertson, G.
Hsia, A.
Author_xml – sequence: 1
  givenname: W. A.
  surname: Zortman
  fullname: Zortman, W. A.
  email: wzortm@sandia.gov
  organization: Appl. Photonic Microsyst., Sandia Nat. Labs., Albuquerque, NM, USA
– sequence: 2
  givenname: D. C.
  surname: Trotter
  fullname: Trotter, D. C.
  organization: Appl. Photonic Microsyst., Sandia Nat. Labs., Albuquerque, NM, USA
– sequence: 3
  givenname: A. L.
  surname: Lentine
  fullname: Lentine, A. L.
  organization: Appl. Photonic Microsyst., Sandia Nat. Labs., Albuquerque, NM, USA
– sequence: 4
  givenname: G.
  surname: Robertson
  fullname: Robertson, G.
  organization: Appl. Photonic Microsyst., Sandia Nat. Labs., Albuquerque, NM, USA
– sequence: 5
  givenname: A.
  surname: Hsia
  fullname: Hsia, A.
  organization: Appl. Photonic Microsyst., Sandia Nat. Labs., Albuquerque, NM, USA
– sequence: 6
  givenname: M. R.
  surname: Watts
  fullname: Watts, M. R.
  organization: Appl. Photonic Microsyst., Sandia Nat. Labs., Albuquerque, NM, USA
BookMark eNo9kM1uwjAQhK2KSgXaF2gveYHQ3Ti2k2NFf6ACgVSqHi3HccA0xJUdqerbNwHEaWd2NZ-0MyKDxjWGkHuECSLkj-_r2WozSQBxkmAGVCRXZIh5SmPgqRhcNGM3ZBTCHoDnyPIhkUvXuNq2O6sj1ZTR5tfFz_ZgmmBdo-po3rRm61XbuchV0Yetre7keuda13SZpdXelTZ8h-iro5y8qY1ufX8Pt-S6UnUwd-c5Jp-vL5vpLF6s3ubTp0WsKaVtLDTmFAUWBWWZAU4VZEWVcgplQdNc5Qw5cuAJFaqCQimhIFEUDWMJ54WiYzI_cUun9vLH24Pyf9IpK48L57dS-dbq2kiRMVEiiqysTMqytKBGgy56UpXlKXas5MTqXgnBm-rCQ5B93fJYt-zrlue6u9DDKWSNMZcARxAMgf4Dy9R9ww
CODEN PJHOC3
CitedBy_id crossref_primary_10_1364_OPTICA_4_000374
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ContentType Journal Article
DBID 97E
ESBDL
RIA
RIE
AAYXX
CITATION
DOA
DOI 10.1109/JPHOT.2011.2180372
DatabaseName IEEE All-Society Periodicals Package (ASPP) 2005–Present
IEEE Open Access Journals
IEEE All-Society Periodicals Package (ASPP) 1998-Present
IEEE Electronic Library Online
CrossRef
Directory of Open Access Journals
DatabaseTitle CrossRef
DatabaseTitleList

Database_xml – sequence: 1
  dbid: DOA
  name: DOAJ Directory of Open Access Journals
  url: https://www.doaj.org/
  sourceTypes: Open Website
– sequence: 2
  dbid: RIE
  name: IEEE Electronic Library Online
  url: https://proxy.k.utb.cz/login?url=https://ieeexplore.ieee.org/
  sourceTypes: Publisher
DeliveryMethod fulltext_linktorsrc
Discipline Applied Sciences
EISSN 1943-0647
EndPage 249
ExternalDocumentID oai_doaj_org_article_7857d1178dfe4584b3ec0cb5526f8941
10_1109_JPHOT_2011_2180372
6107510
Genre orig-research
GroupedDBID 0R~
29O
4.4
5VS
6IK
97E
AAJGR
ACIWK
ADBBV
AENEX
AETIX
ALMA_UNASSIGNED_HOLDINGS
BCNDV
BEFXN
BFFAM
BGNUA
BKEBE
BPEOZ
EBS
EJD
ESBDL
GROUPED_DOAJ
HZ~
IFIPE
IPLJI
JAVBF
M43
M~E
O9-
OCL
OK1
RIA
RIE
RIG
AAYXX
CITATION
ID FETCH-LOGICAL-c333t-7c193171bb358e063a08bf4630db349a95161606237af0baa7a02a31e55266ba3
IEDL.DBID RIE
ISSN 1943-0655
IngestDate Tue Oct 22 15:13:04 EDT 2024
Fri Aug 23 02:43:05 EDT 2024
Mon Nov 04 11:47:57 EST 2024
IsDoiOpenAccess true
IsOpenAccess true
IsPeerReviewed true
IsScholarly true
Issue 1
Language English
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-c333t-7c193171bb358e063a08bf4630db349a95161606237af0baa7a02a31e55266ba3
OpenAccessLink https://proxy.k.utb.cz/login?url=https://ieeexplore.ieee.org/document/6107510
PageCount 8
ParticipantIDs ieee_primary_6107510
crossref_primary_10_1109_JPHOT_2011_2180372
doaj_primary_oai_doaj_org_article_7857d1178dfe4584b3ec0cb5526f8941
PublicationCentury 2000
PublicationDate 2012-02-01
PublicationDateYYYYMMDD 2012-02-01
PublicationDate_xml – month: 02
  year: 2012
  text: 2012-02-01
  day: 01
PublicationDecade 2010
PublicationTitle IEEE photonics journal
PublicationTitleAbbrev JPHOT
PublicationYear 2012
Publisher IEEE
Publisher_xml – name: IEEE
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– ident: ref9
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SSID ssj0069159
Score 1.990066
Snippet A low-power silicon photonic disk resonator is monolithically and two-dimensionally integrated with complementary metal-oxide-semiconductor (CMOS) electronics....
SourceID doaj
crossref
ieee
SourceType Open Website
Aggregation Database
Publisher
StartPage 242
SubjectTerms 2-D integration
Bit error rate
CMOS
CMOS integrated circuits
Inverters
Modulation
monolithic integration
Performance evaluation
Photonics
Silicon
silicon photonic devices
SummonAdditionalLinks – databaseName: Directory of Open Access Journals
  dbid: DOA
  link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV09T8MwELVQJxa-CqJ8yQMbimrnEjse-apKpUIlWtEtsuNErUAJokX8fc5xWujEwugosqx3sd87-fKOkEvrWnJbBUGYMBNEWseBjmMIkKxAKMikrG9Mh4-iP4kG03j6q9WXqwnz9sAeuK5MYmk5l4ktcnenZyDPWGbiOBRFoiKf-DC1Sqb8GSwUsvTqFxmmuoNR_2ns_TqR0hjIcIOGarf-jfYqNbv09shOIwvptV_OPtnKywOy20hE2mzARZukuAddxdpsnlFdWjr-qoI7Z9DvzTXoQ-P-gCNaFfR5_oaRLuloVi2dBy4duvo7O1-8LugLzuLHP61wFodk0rsf3_aDpkdCkAHAMpAZKjAuuTEQJznqDc0SU0QCmDUQKY0CSnBMUkKQumBGa6lZqIHnDkBhNByRVlmV-TGhlhfIaAAqyXmUadQdhTA8MtKiJBCF7JCrFWTpu7fCSOsUgqm0Bjh1AKcNwB1y41Bdv-lsrOsHGNy0CW76V3A7pO1isp4EtZ7EQ-TkP-Y-Jdu43tBXYJ-R1vLjMz9HgbE0F_W39A10-cnh
  priority: 102
  providerName: Directory of Open Access Journals
Title Monolithic and Two-Dimensional Integration of Silicon Photonic Microdisks With Microelectronics
URI https://ieeexplore.ieee.org/document/6107510
https://doaj.org/article/7857d1178dfe4584b3ec0cb5526f8941
Volume 4
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV1LT9wwELYop154V11okQ_caBY7E8fxkfLQFmlbJBaVW-RXxGpRUnWzQuLQ387YyS4Ccegliq3IGmXsfJ_jmW8IOXKhJLdTkKQFM0mmtUi0EJAgWEGuwEoZT0zHP_PRbXZ1J-7WyLdVLoz3Pgaf-WG4jWf5rrGL8KvsBKFeipBP9UEq1eVqLb-6uUJcXibFMHVydT36NekUOhHEGMj0FfBEff5XBVUinlxukvHSki6MZDZctGZon96INP6vqVtkoyeW9LSbCdtkzdc7ZLMnmbRfwvNdUuIqDjFv91NLde3o5LFJzoPEfyfPQX_0-hHYok1Fb6YPOFdqen3ftEFFl45DBJ-bzmdz-htH6dovxXTme-T28mJyNkr6KguJBYA2kRY5HJfcGBCFR8aiWWGqLAfmDGRKIwXLOW5zUpC6YkZrqVmqgXshENyNhk9kvW5q_5lQxyvERABVeJ5Zjcylyg3PjHRIKvJKDsjx0gXln05Mo4ybEKbK6LAyOKzsHTYg34OXVk8GIezYgS-67NdVKQshHeeycJUPR74GvGXWBNuqQmV8QHaDc1aD9H7Zf7_7gHxEC9IuKvsLWW__LvxXJB2tOYybdbyO_10cxpn3DOLS1eg
link.rule.ids 315,783,787,799,867,2109,27936,27937,55086
linkProvider IEEE
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV1Lb9QwEB5V5QAXChTEUh4-cINs7UwcJ0de1bZ0SyW2ojfLr6irogSxWVXi1zN2souKOHCLLcsaZex8n-OZbwBe-1iS29eY5RW3WWGMzIyUmBFYYVmjUyrdmM7PytlFcXIpL3fg7TYXJoSQgs_CND6mu3zfuXX8VXZIUK9kzKe6Q7y6Kodsrc13t6wJmTdpMbw-PDmffVkMGp0EYxxVfgt6kkL_rZIqCVGO9mC-sWUIJLmerns7db_-kmn8X2MfwP2RWrJ3w1p4CDuhfQR7I81k4yZe7YOmfRyj3q6WjpnWs8VNl32MIv-DQAc7HhUkqMW6hn1dfqfV0rLzq66POrpsHmP4_HJ1vWLfaJah_aeczuoxXBx9WnyYZWOdhcwhYp8pRyxOKGEtyioQZzG8sk1RIvcWi9oQCSsFHXRyVKbh1hhleG5QBCkJ3q3BJ7Dbdm14CsyLhlARsa6CKJwh7tKUVhRWeaIVZaMm8GbjAv1jkNPQ6RjCa50cpqPD9OiwCbyPXtqOjFLYqYNetB53llaVVF4IVfkmxEtfi8FxZ6NtTVUXYgL70TnbSUa_PPt39yu4O1vMT_Xp8dnnA7hH1uRDjPZz2O1_rsMLoiC9fZlW3m8ihNcN
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Monolithic+and+Two-Dimensional+Integration+of+Silicon+Photonic+Microdisks+With+Microelectronics&rft.jtitle=IEEE+photonics+journal&rft.au=Zortman%2C+W.+A.&rft.au=Trotter%2C+D.+C.&rft.au=Lentine%2C+A.+L.&rft.au=Robertson%2C+G.&rft.date=2012-02-01&rft.pub=IEEE&rft.eissn=1943-0647&rft.volume=4&rft.issue=1&rft.spage=242&rft.epage=249&rft_id=info:doi/10.1109%2FJPHOT.2011.2180372&rft.externalDocID=6107510
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1943-0655&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1943-0655&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1943-0655&client=summon