Monolithic and Two-Dimensional Integration of Silicon Photonic Microdisks With Microelectronics

A low-power silicon photonic disk resonator is monolithically and two-dimensionally integrated with complementary metal-oxide-semiconductor (CMOS) electronics. The results show direct integration with established CMOS manufacturing lines without changing either the CMOS or the photonic process stack...

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Bibliographic Details
Published inIEEE photonics journal Vol. 4; no. 1; pp. 242 - 249
Main Authors Zortman, W. A., Trotter, D. C., Lentine, A. L., Robertson, G., Hsia, A., Watts, M. R.
Format Journal Article
LanguageEnglish
Published IEEE 01.02.2012
Subjects
2-D integration
Bit error rate
CMOS
CMOS integrated circuits
Inverters
Modulation
monolithic integration
Performance evaluation
Photonics
Silicon
silicon photonic devices
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Summary:A low-power silicon photonic disk resonator is monolithically and two-dimensionally integrated with complementary metal-oxide-semiconductor (CMOS) electronics. The results show direct integration with established CMOS manufacturing lines without changing either the CMOS or the photonic process stack. Comparable results for each integration method show subpicojoule per bit modulation and the potential for further reductions. The analysis reveals that the process of integration does not limit the performance of photonic or electronic components, and clear steps to use smaller drivers to achieve sub-50 fJ/bit at 10 Gb/s operation are available.
ISSN:1943-0655
1943-0647
DOI:10.1109/JPHOT.2011.2180372