Preparation, characterization and performance of Ti1−xAlxN/Ag/Ti1−xAlxN low-emissivity films

• Published in: Applied surface science Vol. 293; pp. 259 - 264
• Main Authors: Huang, Jiamu, Xiang, Chengjie, Li, Shaohui, Zhao, Xiaoli, He, Guoqing
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 28.02.2014; Elsevier
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Low emissivity; Magnetron sputtering; Physics; Sandwich structure; Titanium Aluminum Nitride; Magnetron sputtering; Low emissivity; Titanium Aluminum Nitride; Sandwich structure; Magnetrons; Cathode sputtering; Emissivity; Preparation; Titanium nitride; Aluminium; Sandwich structures; Film growth
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2013.12.146

•Ti1−xAlxN/Ag/Ti1−xAlxN sandwich structure low-emissivity films were prepared by radio frequency reactive magnetron sputtering.•The corrosion behavior of the Ti1−xAlxN coatings was investigated using potentiodynamic polarization measurements.•The multilayer films exhibit an excellent visible light transmittance as high as 89.5% at λ=550nm, and it also presents a remarkable high infrared reflectivity exceeding 96% in the 2.5∼25μm range. In this paper, Ti1−xAlxN/Ag/Ti1−xAlxN sandwich structure low-emissivity (Low-E) films were prepared by radio frequency reactive magnetron sputtering (RF-MS) on glass substrates. The morphology, chemical state and performance of the film system were characterized by FIB-SEM, XPS, FT-IR, UV–vis spectrophotometer and electrochemical workstation. The results showed that the multilayer films exhibit an excellent visible light transmittance (T%>85% at λ=550nm) and remarkable high infrared reflectivity (R%>96% in the 2.5∼25μm range). The Ti1−xAlxN dielectric-layer could not only increase transmittance in the visible light range of Ag film based on an anti-reflection effect, but also modify the intrinsic color of Ag film from sapphire to total color neutrality. In addition, Ti1−xAlxN layer could enhance the chemical stability of the Ag film. In principle, the approach to obtain Ti1−xAlxN/Ag/Ti1−xAlxN sandwich structure in our work could provide an alternative way to fabricate outstanding Low-E films.