Microring-resonator-based add-drop filters in SiN: fabrication and analysis

Third-order add-drop filters based on series-coupled microring resonators were fabricated in silicon-rich silicon nitride with accurate dimensional control and negligible sidewall roughness. For the first time, a low 3 dB drop loss is demonstrated with a wide 24 nm free-spectral-range in a high-orde...

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Published inOptics express Vol. 12; no. 7; pp. 1437 - 1442
Main Authors Barwicz, Tymon, Popović, Milos, Rakich, Peter, Watts, Michael, Haus, Hermann, Ippen, Erich, Smith, Henry
Format Journal Article
LanguageEnglish
Published United States 05.04.2004
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Summary:Third-order add-drop filters based on series-coupled microring resonators were fabricated in silicon-rich silicon nitride with accurate dimensional control and negligible sidewall roughness. For the first time, a low 3 dB drop loss is demonstrated with a wide 24 nm free-spectral-range in a high-order microring filter without using the Vernier effect. The spectral response is matched by rigorous numerical simulation, and non-idealities in the drop- and through-port responses are shown to be of design origin and to be correctable.
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ISSN:1094-4087
1094-4087
DOI:10.1364/OPEX.12.001437