Angular distribution of atoms sputtered from alloys
The angular distribution of atoms sputtered from Co 5Sm alloy under 3 keV Ar + and 10 keV Xe + ion bombardment (normal incidence) has been studied experimentally. RBS was used to analyze a material deposited on a collector. The surface composition of Ni x Pd y alloys ( x, y = 1, 3, 5) irradiated by...
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Published in | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 270; pp. 50 - 54 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
2012
|
Subjects | |
Online Access | Get full text |
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Summary: | The angular distribution of atoms sputtered from Co
5Sm alloy under 3
keV Ar
+ and 10
keV Xe
+ ion bombardment (normal incidence) has been studied experimentally. RBS was used to analyze a material deposited on a collector. The surface composition of Ni
x
Pd
y
alloys (
x,
y
=
1, 3, 5) irradiated by 3
keV Ar
+ ions was also investigated
in situ by Auger electron spectroscopy. Results of these measurements compared with our previous data on component angular distributions sputtered from Ni
5Pd alloy. Sm segregation was found to effect on component angular distributions sputtered from Co
5Sm alloy. It has been found by using AES that Pd segregates to the surface in Ni
5Pd–NiPd
3 alloys, while Ni – in NiPd
5 alloy. A new approach to description of component angular distributions sputtered from Ni
x
Pd
y
and Co
5Sm alloys presented. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0168-583X 1872-9584 |
DOI: | 10.1016/j.nimb.2011.09.015 |