A magnetic electron energy analyser for fast data acquisition

• Published in: Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Vol. 645; no. 1; pp. 257 - 259
• Main Authors: Zha, X., Walker, C.G.H., El-Gomati, M.M.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 21.07.2011
• Subjects: Accelerators; Active Pixel Sensor; Active pixel sensors; Auger electron spectroscopy; Augers; Electron energy analyser; Electron energy analysers; Magnetic fields; Magnetic spectrometer; Microchannel plates; Scanning electron microscopy; Spectra; Spectrometers; Scanning electron microscopy; Magnetic spectrometer; Active Pixel Sensor; Auger electron spectroscopy; Electron energy analyser
• ISSN: 0168-9002; 1872-9576
• DOI: 10.1016/j.nima.2010.12.139

A new approach to the acquisition of Auger electron spectra is introduced. Electrons emitted from a sample illuminated by a primary electron beam are dispersed by a magnetic field which immerses both sample and electron energy analyser. The analyser is broadly based on the 180° magnetic spectrometer, but can acquire spectra with good energy resolution for electrons with a significant component of velocity parallel to the magnetic field. An Active Pixel Sensor is used to acquire the electron spectrum without the use of a microchannel plate as in most currently used analysers. An example spectrum of an elastic peak is given.