Development of the program EOD for design in electron and ion microscopy
The paper surveys new features of the EOD program, a complete workplace for the design of electron and ion microscopes. The extensions of the program for space charge computations, interaction with gases in the specimen chamber and misalignments are handled as plug-ins, keeping the program as a sing...
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| Published in | Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Vol. 645; no. 1; pp. 278 - 282 |
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| Main Authors | , |
| Format | Journal Article |
| Language | English |
| Published |
Elsevier B.V
21.07.2011
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| Subjects | |
| Online Access | Get full text |
| ISSN | 0168-9002 1872-9576 |
| DOI | 10.1016/j.nima.2010.12.198 |
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| Abstract | The paper surveys new features of the EOD program, a complete workplace for the design of electron and ion microscopes. The extensions of the program for space charge computations, interaction with gases in the specimen chamber and misalignments are handled as plug-ins, keeping the program as a single unit. The current status of the tolerancing plug-in is described in more detail. |
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| AbstractList | The paper surveys new features of the EOD program, a complete workplace for the design of electron and ion microscopes. The extensions of the program for space charge computations, interaction with gases in the specimen chamber and misalignments are handled as plug-ins, keeping the program as a single unit. The current status of the tolerancing plug-in is described in more detail. |
| Author | Zlámal, J. Lencová, B. |
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| References | Lencová, Zlámal (bib1) 2008; 1 Lencová (bib4) 1999; 427 Lencová, Lenc, van der Mast (bib3) 1989; 7 Jánský (bib8) 2009; 84 Lencová, Lenc (bib2) 1986 Oral, Lencová (bib6) 2009; 109 Zhu, Liu, Rouse, Munro (bib5) 1996; 2858 V. Neděla, I. Konvalina, B. Lencová, J. Zlámal, Nucl. Instr. and Meth. A (CPO-8 proceedings), this issue MEBS Software Catalogue, January 2010, available at: 〈http://www.mebs.co.uk〉. Sturrock (bib10) 1951; 243 P.W. Hawkes, in: J. Orloff (Ed.), Handbook of Charged Particle Optics, second ed., CRC Press, pp. 209. Liu, Zhu (bib12) 1990; 84 Dahl (bib7) 2000; 200 Munro (bib13) 1988; 6 Lencová (10.1016/j.nima.2010.12.198_bib2) 1986 Zhu (10.1016/j.nima.2010.12.198_bib5) 1996; 2858 Sturrock (10.1016/j.nima.2010.12.198_bib10) 1951; 243 Dahl (10.1016/j.nima.2010.12.198_bib7) 2000; 200 Liu (10.1016/j.nima.2010.12.198_bib12) 1990; 84 Lencová (10.1016/j.nima.2010.12.198_bib3) 1989; 7 10.1016/j.nima.2010.12.198_bib14 10.1016/j.nima.2010.12.198_bib9 10.1016/j.nima.2010.12.198_bib11 Munro (10.1016/j.nima.2010.12.198_bib13) 1988; 6 Jánský (10.1016/j.nima.2010.12.198_bib8) 2009; 84 Lencová (10.1016/j.nima.2010.12.198_bib1) 2008; 1 Oral (10.1016/j.nima.2010.12.198_bib6) 2009; 109 Lencová (10.1016/j.nima.2010.12.198_bib4) 1999; 427 |
| References_xml | – year: 1986 ident: bib2 article-title: SEM 1986, Part III – volume: 109 start-page: 1365 year: 2009 ident: bib6 publication-title: Ultramicroscopy – reference: P.W. Hawkes, in: J. Orloff (Ed.), Handbook of Charged Particle Optics, second ed., CRC Press, pp. 209. – volume: 200 start-page: 3 year: 2000 ident: bib7 publication-title: Int. J. Mass Spectrom. – volume: 6 start-page: 941 year: 1988 ident: bib13 publication-title: J. Vac. Sci. Technol. B – volume: 243 start-page: 387 year: 1951 ident: bib10 publication-title: Phil. Trans. Roy. Soc. London A – volume: 84 start-page: 357 year: 2009 ident: bib8 publication-title: Vacuum – volume: 84 start-page: 123 year: 1990 ident: bib12 publication-title: Optik – volume: 427 start-page: 329 year: 1999 ident: bib4 publication-title: Nucl. Instr. and Meth. A – volume: 7 start-page: 1846 year: 1989 ident: bib3 publication-title: J. Vac. Sci. Technol. B – reference: V. Neděla, I. Konvalina, B. Lencová, J. Zlámal, Nucl. Instr. and Meth. A (CPO-8 proceedings), this issue, – volume: 1 start-page: 315 year: 2008 ident: bib1 publication-title: Physics Procedia – volume: 2858 start-page: 68 year: 1996 ident: bib5 publication-title: SPIE – reference: MEBS Software Catalogue, January 2010, available at: 〈http://www.mebs.co.uk〉. – ident: 10.1016/j.nima.2010.12.198_bib14 – ident: 10.1016/j.nima.2010.12.198_bib11 – ident: 10.1016/j.nima.2010.12.198_bib9 doi: 10.1016/j.nima.2010.12.200 – volume: 2858 start-page: 68 year: 1996 ident: 10.1016/j.nima.2010.12.198_bib5 publication-title: SPIE – volume: 109 start-page: 1365 year: 2009 ident: 10.1016/j.nima.2010.12.198_bib6 publication-title: Ultramicroscopy doi: 10.1016/j.ultramic.2009.07.001 – volume: 6 start-page: 941 year: 1988 ident: 10.1016/j.nima.2010.12.198_bib13 publication-title: J. Vac. Sci. Technol. B doi: 10.1116/1.584329 – volume: 84 start-page: 357 year: 2009 ident: 10.1016/j.nima.2010.12.198_bib8 publication-title: Vacuum doi: 10.1016/j.vacuum.2009.07.007 – volume: 84 start-page: 123 year: 1990 ident: 10.1016/j.nima.2010.12.198_bib12 publication-title: Optik – year: 1986 ident: 10.1016/j.nima.2010.12.198_bib2 – volume: 1 start-page: 315 year: 2008 ident: 10.1016/j.nima.2010.12.198_bib1 publication-title: Physics Procedia doi: 10.1016/j.phpro.2008.07.111 – volume: 7 start-page: 1846 year: 1989 ident: 10.1016/j.nima.2010.12.198_bib3 publication-title: J. Vac. Sci. Technol. B doi: 10.1116/1.584678 – volume: 200 start-page: 3 year: 2000 ident: 10.1016/j.nima.2010.12.198_bib7 publication-title: Int. J. Mass Spectrom. doi: 10.1016/S1387-3806(00)00305-5 – volume: 427 start-page: 329 year: 1999 ident: 10.1016/j.nima.2010.12.198_bib4 publication-title: Nucl. Instr. and Meth. A doi: 10.1016/S0168-9002(98)01551-4 – volume: 243 start-page: 387 year: 1951 ident: 10.1016/j.nima.2010.12.198_bib10 publication-title: Phil. Trans. Roy. Soc. London A |
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| SubjectTerms | Accelerators Chambers Computation Finite element method Ion microscopes Microscopy Misalignment Space charge Tolerancing User interface Workplaces |
| Title | Development of the program EOD for design in electron and ion microscopy |
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