Development of the program EOD for design in electron and ion microscopy
The paper surveys new features of the EOD program, a complete workplace for the design of electron and ion microscopes. The extensions of the program for space charge computations, interaction with gases in the specimen chamber and misalignments are handled as plug-ins, keeping the program as a sing...
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Published in | Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Vol. 645; no. 1; pp. 278 - 282 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
21.07.2011
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Subjects | |
Online Access | Get full text |
ISSN | 0168-9002 1872-9576 |
DOI | 10.1016/j.nima.2010.12.198 |
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Summary: | The paper surveys new features of the EOD program, a complete workplace for the design of electron and ion microscopes. The extensions of the program for space charge computations, interaction with gases in the specimen chamber and misalignments are handled as plug-ins, keeping the program as a single unit. The current status of the tolerancing plug-in is described in more detail. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0168-9002 1872-9576 |
DOI: | 10.1016/j.nima.2010.12.198 |