The effect of Al target current on the structure and properties of (Nb2Al)N films with an amorphous AlN phase
Nanocomposite films based on (Nb2Al)N intermetallic nitride have been obtained by the method of magnetron sputtering. X-ray diffraction analysis revealed two stable states of the crystalline structure: (i) NbN with low amount (within 5 at %) of dissolved Al in a composition close to (Nb 2 Al)N and (...
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| Published in | Technical physics letters Vol. 41; no. 7; pp. 697 - 700 |
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| Main Authors | , , , , , , |
| Format | Journal Article |
| Language | English |
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Moscow
Pleiades Publishing
01.07.2015
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| Abstract | Nanocomposite films based on (Nb2Al)N intermetallic nitride have been obtained by the method of magnetron sputtering. X-ray diffraction analysis revealed two stable states of the crystalline structure: (i) NbN with low amount (within 5 at %) of dissolved Al in a composition close to (Nb
2
Al)N and (ii) an amorphous component related to aluminum nitride formed by reactive magnetron sputtering. The substructural characteristics (grain size and microdeformation level) are sensitive to the current via Al target and exhibit correlation with nanohardness and Knoop hardness of the film, which vary within 29–33.5 and 46–48 GPa, respectively. |
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| AbstractList | Nanocomposite films based on (Nb2Al)N intermetallic nitride have been obtained by the method of magnetron sputtering. X-ray diffraction analysis revealed two stable states of the crystalline structure: (i) NbN with low amount (within 5 at %) of dissolved Al in a composition close to (Nb
2
Al)N and (ii) an amorphous component related to aluminum nitride formed by reactive magnetron sputtering. The substructural characteristics (grain size and microdeformation level) are sensitive to the current via Al target and exhibit correlation with nanohardness and Knoop hardness of the film, which vary within 29–33.5 and 46–48 GPa, respectively. |
| Author | Dub, S. N. Meilekhov, A. A. Sobol’, O. V. Rogoz, V. N. Kupchishin, A. I. Ivashchenko, V. I. Pogrebnjak, A. D. |
| Author_xml | – sequence: 1 givenname: V. I. surname: Ivashchenko fullname: Ivashchenko, V. I. organization: Institute for Problems in Materials Science, National Academy of Sciences of Ukraine – sequence: 2 givenname: A. D. surname: Pogrebnjak fullname: Pogrebnjak, A. D. email: alexp@i.ua organization: Sumy National University – sequence: 3 givenname: O. V. surname: Sobol’ fullname: Sobol’, O. V. organization: National Technical University Kharkiv Polytechnic Institute – sequence: 4 givenname: V. N. surname: Rogoz fullname: Rogoz, V. N. organization: Sumy National University – sequence: 5 givenname: A. A. surname: Meilekhov fullname: Meilekhov, A. A. organization: National Technical University Kharkiv Polytechnic Institute – sequence: 6 givenname: S. N. surname: Dub fullname: Dub, S. N. organization: V. Bakul Institute for Superhard Materials – sequence: 7 givenname: A. I. surname: Kupchishin fullname: Kupchishin, A. I. organization: Abai Kazakh National Pedagogical University |
| BookMark | eNp9kMtqwzAQRUVJoUnaD-hOy3bhViNZjr0MoS8I7qLp2sjyKHbwC0mm9O8rk-4KXQwzzNxzGe6KLPqhR0JugT0AiPjxA1giNqlkINmGcYgvyBJYxqJECrGY50RE8_2KrJw7McZSLrMl6Q41UjQGtaeDoduWemWP6KmerMU-LHvqg8R5O2k_WaSqr-hohxGtb9DN0F1e8m17n1PTtJ2jX42vg4qqbrBjPUwuuOZ0rJXDa3JpVOvw5revyefz02H3Gu3fX952232khQAfIcqsVLLSwmgDaZxCtTEqhlJmqUEWqlIlpJyJMks151xxg4kAk6gMZFmKNYGzr7aDcxZNMdqmU_a7AFbMeRV_8goMPzMuaPsj2uI0TLYPb_4D_QBEc28M |
| CitedBy_id | crossref_primary_10_1134_S106378421605011X |
| Cites_doi | 10.1016/S0168-583X(98)00679-X 10.1116/1.581425 10.4028/www.scientific.net/SSP.127.195 10.1557/JMR.2008.0168 10.1088/0022-3727/43/14/145403 10.12693/APhysPolA.125.1284 10.1016/j.surfcoat.2010.01.023 10.1016/0042-207X(95)00161-1 10.1557/mrs2003.57 |
| ContentType | Journal Article |
| Copyright | Pleiades Publishing, Ltd. 2015 |
| Copyright_xml | – notice: Pleiades Publishing, Ltd. 2015 |
| DBID | AAYXX CITATION |
| DOI | 10.1134/S1063785015070214 |
| DatabaseName | CrossRef |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Physics |
| EISSN | 1090-6533 |
| EndPage | 700 |
| ExternalDocumentID | 10_1134_S1063785015070214 |
| GroupedDBID | -5F -5G -BR -EM -Y2 -~C -~X .VR 06D 0R~ 0VY 123 1N0 29Q 29~ 2J2 2JN 2JY 2KG 2KM 2LR 2VQ 2~H 30V 4.4 408 40D 40E 5VS 6NX 8TC 8UJ 95- 95. 95~ 96X AAAVM AABHQ AAFGU AAHNG AAIAL AAJKR AANZL AAPBV AARHV AARTL AATNV AATVU AAUYE AAWCG AAYFA AAYIU AAYQN AAYTO ABBBX ABDBF ABDZT ABECU ABFGW ABFTV ABHLI ABHQN ABJNI ABJOX ABKAS ABKCH ABKTR ABMNI ABMQK ABNWP ABPTK ABQBU ABSXP ABTEG ABTHY ABTKH ABTMW ABULA ABWNU ABXPI ACBMV ACBRV ACBXY ACBYP ACGFS ACHSB ACHXU ACIGE ACIPQ ACKNC ACMDZ ACMLO ACOKC ACOMO ACTTH ACVWB ACWMK ADHHG ADHIR ADINQ ADKNI ADKPE ADMDM ADOXG ADRFC ADTPH ADURQ ADYFF ADZKW AEBTG AEFTE AEGAL AEGNC AEJHL AEJRE AEKMD AENEX AEOHA AEPYU AESTI AETLH AEVLU AEVTX AEXYK AFFNX AFGCZ AFLOW AFNRJ AFQWF AFWTZ AFZKB AGAYW AGDGC AGGBP AGJBK AGMZJ AGQMX AGWIL AGWZB AGYKE AHAVH AHBYD AHSBF AHYZX AIAKS AIIXL AILAN AIMYW AITGF AJBLW AJDOV AJRNO AKQUC ALMA_UNASSIGNED_HOLDINGS ALWAN AMKLP AMXSW AMYLF AMYQR AOCGG ARMRJ ASPBG AVWKF AXYYD AZFZN B-. B0M BA0 BDATZ BGNMA CAG COF CS3 CSCUP DDRTE DNIVK DPUIP DU5 EAD EAP EAS EBLON EBS EIOEI EJD EMK EPL ESBYG EST ESX FEDTE FERAY FFXSO FIGPU FINBP FNLPD FRRFC FSGXE FWDCC GGCAI GGRSB GJIRD GNWQR GQ6 GQ7 HF~ HG6 HMJXF HRMNR HVGLF HZ~ I-F IJ- IKXTQ IWAJR IXD I~X I~Z J-C JBSCW JZLTJ KOV LLZTM M4Y MA- N2Q NB0 NPVJJ NQJWS NU0 O9- O93 O9J P9T PF0 PT4 QOS R89 R9I RIG RNS ROL RSV S16 S1Z S27 S3B SAP SDH SHX SISQX SJYHP SNE SNPRN SNX SOHCF SOJ SPH SPISZ SRMVM SSLCW STPWE SZN T13 TSG TUC TUS UG4 UNUBA UOJIU UTJUX UZXMN VC2 VCL VFIZW W23 W48 WK8 XU3 YLTOR Z7R Z7S Z7U Z7X Z7Y Z83 Z88 ZMTXR ~8M ~A9 AACDK AAJBT AASML AAYXX ABAKF ACAOD ACDTI ACZOJ AEFQL AEMSY AFBBN AGRTI AIGIU CITATION H13 VIT |
| ID | FETCH-LOGICAL-c331t-ee59ba5dc3fcf18481d7fa41b598fe08fedab18203b98c222a2fe631f6a915bb3 |
| IEDL.DBID | AGYKE |
| ISSN | 1063-7850 |
| IngestDate | Thu Sep 12 16:37:29 EDT 2024 Sat Dec 16 12:00:21 EST 2023 |
| IsDoiOpenAccess | false |
| IsOpenAccess | true |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 7 |
| Keywords | Knoop Hardness Nanocomposite Film Technical Physic Letter Aluminum Nitride Substructural Characteristic |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c331t-ee59ba5dc3fcf18481d7fa41b598fe08fedab18203b98c222a2fe631f6a915bb3 |
| OpenAccessLink | https://essuir.sumdu.edu.ua/bitstream/123456789/46105/1/Amorphous_Ivashchenko.pdf |
| PageCount | 4 |
| ParticipantIDs | crossref_primary_10_1134_S1063785015070214 springer_journals_10_1134_S1063785015070214 |
| PublicationCentury | 2000 |
| PublicationDate | 2015-07-01 |
| PublicationDateYYYYMMDD | 2015-07-01 |
| PublicationDate_xml | – month: 07 year: 2015 text: 2015-07-01 day: 01 |
| PublicationDecade | 2010 |
| PublicationPlace | Moscow |
| PublicationPlace_xml | – name: Moscow |
| PublicationTitle | Technical physics letters |
| PublicationTitleAbbrev | Tech. Phys. Lett |
| PublicationYear | 2015 |
| Publisher | Pleiades Publishing |
| Publisher_xml | – name: Pleiades Publishing |
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| References_xml | – volume: 148 start-page: 925 issue: 1–4 year: 1999 ident: 971_CR2 publication-title: Nucl. Instrum. Methods. Phys. Res., Sect. B doi: 10.1016/S0168-583X(98)00679-X contributor: fullname: Y Gotoh – volume: 16 start-page: 2804 year: 1998 ident: 971_CR10 publication-title: J. Vac. Sci. Technol. A doi: 10.1116/1.581425 contributor: fullname: K Jadannadham – volume: 127 start-page: 195 year: 2007 ident: 971_CR4 publication-title: Solid State Phenom. doi: 10.4028/www.scientific.net/SSP.127.195 contributor: fullname: Y Makino – volume-title: Metal Physics: Atomic Structure of Metals and Alloys year: 1978 ident: 971_CR9 contributor: fullname: Ya S Umanskii – volume: 23 start-page: 1258 year: 2008 ident: 971_CR5 publication-title: J. Mater. Res. doi: 10.1557/JMR.2008.0168 contributor: fullname: H C Barshilla – volume: 41 start-page: 145403 year: 2010 ident: 971_CR7 publication-title: J. Phys. D: Appl. Phys. doi: 10.1088/0022-3727/43/14/145403 contributor: fullname: D Holec – ident: 971_CR8 – volume: 125 start-page: 1284 year: 2014 ident: 971_CR11 publication-title: Acta Phys. Pol. A doi: 10.12693/APhysPolA.125.1284 contributor: fullname: A D Pogrebnjak – volume: 204 start-page: 2447 year: 2010 ident: 971_CR3 publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2010.01.023 contributor: fullname: R Franz – volume: 46 start-page: 1401 issue: 12 year: 1995 ident: 971_CR6 publication-title: Vacuum doi: 10.1016/0042-207X(95)00161-1 contributor: fullname: T I Selinder – volume: 28 start-page: 169 year: 2003 ident: 971_CR1 publication-title: MRS Bull. doi: 10.1557/mrs2003.57 contributor: fullname: S A Barnett |
| SSID | ssj0008259 |
| Score | 2.0662394 |
| Snippet | Nanocomposite films based on (Nb2Al)N intermetallic nitride have been obtained by the method of magnetron sputtering. X-ray diffraction analysis revealed two... |
| SourceID | crossref springer |
| SourceType | Aggregation Database Publisher |
| StartPage | 697 |
| SubjectTerms | Classical and Continuum Physics Physics Physics and Astronomy |
| Title | The effect of Al target current on the structure and properties of (Nb2Al)N films with an amorphous AlN phase |
| URI | https://link.springer.com/article/10.1134/S1063785015070214 |
| Volume | 41 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV07T8MwELZKKyQW3ohn5YGBh1JIHDvxmKIWBCILIJWpil8C0SYVaRd-Pec4rYSAoUO2s5XYF993D3-H0GkQqVhQy7HPAuWFJgy9GKyEJ8GVYIoqRrS94PyYsruX8H5ABw0ULEIX-UdnnpGsDmrXdiS8egLfhUQxtR56ZIm-VlCL2q7UTdRKbl8feovzF3weXuU4GfHsgDqX-eckP63Rz1RoZWH6G-7WX1kRE9rCko_ObCo68us3beMSL7-J1mvAiROnIVuoofNttFoVfspyB41BT7Ar6sCFwckIu9pwLB1xEy5yDBgRO57Z2afGWa7wxIbwPy0Xqx10loogGZ2n2LyPxiW2oV2Qwtm4gE0sZiXMmuLJG9jLXfTS7z3f3Hl1CwZPEuJPPa0pFxlVkhhpfEu9ryKThb6gPDb6Gh6VCcsBTwSPJWCNLDCaEd-wjPtUCLKHmnmR632EOY0BKlFqIqFDHmsO32aYYVRdSy64OkAX860YThzTxrDyUEg4_LV-B-hyvtDD-qcr_5c-XEr6CK0BKqKuJvcYNWF99Qkgj6log6r1u920XavcN6D8zg4 |
| link.rule.ids | 315,786,790,27957,27958,41116,42185,52146 |
| linkProvider | Springer Nature |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV1LT9wwEB6VRRW9tIW2glLABw5AFUrWj8THFQKWVy5dJHqK4pdA7CYrsnvpr2ccJ0i8DhxyG1vOeOyZ8Xz-DLDdT0yquOfYF30TMcdYlKKXiDSmEsJwI6j1F5wvMzG8YmfX_Lq9x113aPeuJNns1OHdEfbnLyYvNEm5T9ETz_S1AIsMHRTvweLg5N_50eMGjEmPbIqcgka-QVvMfLWTp-7oaS20cTHHX2DUDS4gS-725zO1r_8_42185-i_wuc25CSDYCPL8MGWK_CxgX7q-htM0FJIgHWQypHBmAR0ONGBuolUJcEokQSm2fm9JUVpyNQf4t97NlbfaCdT_cF4NyPudjypiT_cRSlSTCqcxmpeY68Zmd6gx_wOV8dHo8Nh1D7CEGlK41lkLZeq4EZTp13syfdN4goWKy5TZw_wM4XyLPBUyVRjtFH0nRU0dqKQMVeK_oBeWZV2FYjkKQZLnLtEWSZTK_HfnHCCmwMtlTRrsNfNRT4NXBt5k6NQlr_Q3xr87hSdt8uuflv657ukt2BpOLq8yC9Os_N1-IQxEg8I3V_QQ13bDYxDZmqztbsHXqTQZg |
| linkToPdf | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV25TsQwELU4BKLhRty4oOBQgKyPxOUKWO4ICZCgCvElELvJiuw2fD3jdYLEVSCKdGMrtseeGc_zG4Q2G5GOJXMc-7yhA2opDWKwEoGCUIJrpjkx7oHzVcJP7-j5Pbuv6pyWNdq9Tkn6Nw2OpSnv7Xe1rWqQ0P0bCGRIFDMXrkeO9WsYjVLYtaDio82Th4vjj8MYAiAxSHhyErgGVWLzx04-m6bPedGBuWlNocf6Rz3K5GWv35N76u0Lh-M_RjKNJitXFDe97sygIZPPorEBJFSVc6gDGoQ93AMXFjfb2KPGsfKUTrjIMXiP2DPQ9l8NznKNu-5y_9WxtLpGW4lsNNvbCbbP7U6J3aUvSOGsU8DyFv0Sek1w9wks6Ty6ax3fHp4GVXGGQBES9gJjmJAZ04pYZUNHyq8jm9FQMhFbcwCfzqRjhydSxAq8kKxhDSeh5ZkImZRkAY3kRW4WERYsBieKMRtJQ0VsBIzNcsuZPlBCCr2Edup1SbuegyMdxC6Ept_mbwnt1pOeVtux_F16-U_SG2j8-qiVXp4lFytoAlwn5oG7q2gEptqsgXvSk-uVCr4DDevZQQ |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=The+effect+of+Al+target+current+on+the+structure+and+properties+of+%28Nb2Al%29N+films+with+an+amorphous+AlN+phase&rft.jtitle=Technical+physics+letters&rft.au=Ivashchenko%2C+V.+I.&rft.au=Pogrebnjak%2C+A.+D.&rft.au=Sobol%E2%80%99%2C+O.+V.&rft.au=Rogoz%2C+V.+N.&rft.date=2015-07-01&rft.issn=1063-7850&rft.eissn=1090-6533&rft.volume=41&rft.issue=7&rft.spage=697&rft.epage=700&rft_id=info:doi/10.1134%2FS1063785015070214&rft.externalDBID=n%2Fa&rft.externalDocID=10_1134_S1063785015070214 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1063-7850&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1063-7850&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1063-7850&client=summon |