Principle, implementation, and applications of charge control for piezo-actuated nanopositioners: A comprehensive review

• Published in: Mechanical systems and signal processing Vol. 171; p. 108885
• Main Authors: Yang, Chen, Youcef-Toumi, Kamal
• Format: Journal Article
• Language: English
• Published: Berlin Elsevier Ltd 15.05.2022; Elsevier BV
• Subjects: Charge control; Control methods; Creep (materials); Feedback control; Feedforward control; Hysteresis and creep linearization; Nanopositioning system; Physical properties; Piezoelectric actuators; Position sensing; Nanopositioning system; Hysteresis and creep linearization; Piezoelectric actuators; Charge control
• ISSN: 0888-3270; 1096-1216
• DOI: 10.1016/j.ymssp.2022.108885

Nanopositioning is a key enabling technology for imaging, manipulation, measurement and fabrication of matters at the nanoscale. Positioners driven by piezoelectric actuators are typical precision mechatronic systems designed for this purpose, aiming to achieve high resolution, high accuracy and fast response. A routine way towards successful nanopositioning requires accurate position sensing and feedback control to overcome hysteresis and creep nonlinearities of piezo-actuators. Charge control, an approach making full use of the physical properties of piezoelectric materials, elegantly mitigates these issues without relying on position sensors or complicated models. In this work, the operating principle, representative implementation schemes, existing issues and applications of charge control strategy are reviewed in a thorough manner. A detailed comparison with respect to model-based feedforward control method further clarifies the practical values of charge control. At last, we highlight some new opportunities for future studies. •Thorough analysis and review of the principle and variations of charge control method.•Systematic summary of recent progresses of charge controller instrumentation.•In-depth discussions of advantages, existing issues and perspectives on future studies of charge control.