Polymer ERD standards and charge integration for low intensity He ion microbeams

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 261; no. 1-2; pp. 452 - 455
• Main Authors: Lovelace, B., Bakhru, H., Haberl, A.W., Benenson, R.E.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.08.2007
• Subjects: Hydrogen analysis; Microbeam ERD; Microscopy of hydrogen; Polymer ERD; Polymer ERD standards; 81.70.−Fy; Polymer ERD standards; 81.70.Lg; Polymer ERD; 29.30.Ep; Microscopy of hydrogen; 81.70.−q; 25.55.Ci; Hydrogen analysis; Microbeam ERD

Mylar and Kapton foils were used as elastic recoil detection (ERD) calibration standards for He ion microbeam currents of the order of 1pA. At these beam currents, electronic charge integration is inadequate. Therefore, the number of incident He ions Q was determined from RBS spectra taken concurren...