Polymer ERD standards and charge integration for low intensity He ion microbeams

Mylar and Kapton foils were used as elastic recoil detection (ERD) calibration standards for He ion microbeam currents of the order of 1pA. At these beam currents, electronic charge integration is inadequate. Therefore, the number of incident He ions Q was determined from RBS spectra taken concurren...

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Published inNuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 261; no. 1-2; pp. 452 - 455
Main Authors Lovelace, B., Bakhru, H., Haberl, A.W., Benenson, R.E.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.08.2007
Subjects
Hydrogen analysis
Microbeam ERD
Microscopy of hydrogen
Polymer ERD
Polymer ERD standards
81.70.−Fy
Polymer ERD standards
81.70.Lg
Polymer ERD
29.30.Ep
Microscopy of hydrogen
81.70.−q
25.55.Ci
Hydrogen analysis
Microbeam ERD
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Summary:Mylar and Kapton foils were used as elastic recoil detection (ERD) calibration standards for He ion microbeam currents of the order of 1pA. At these beam currents, electronic charge integration is inadequate. Therefore, the number of incident He ions Q was determined from RBS spectra taken concurrently with the ERD. In one method, a Ta mask was overlaid on the polymer, and the beam was scanned across the boundary. Q was determined using the RBS peak from the Ta surface. Another method used the RBS spectrum from the polymer surface directly, where Q was determined from the nuclear resonances of He scattered from C at 5.67MeV and He scattered from O at 3.039MeV.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:0168-583X
1872-9584
DOI:10.1016/j.nimb.2007.03.036