Measurement of the temporal evolution of electron density in a nanosecond pulsed argon microplasma: using both Stark broadening and an OES line-ratio method
The temporal evolution of electron density in a nanosecond pulsed argon microplasma is measured using a combination of Stark broadening and the optical emission line-ratio method. In the initial discharge period (0-100 ns), the electron density can reach as high as ∼1018 cm−3. It decreases to ∼1017-...
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Published in | Journal of physics. D, Applied physics Vol. 45; no. 29; pp. 295201 - 1-11 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
IOP Publishing
25.07.2012
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Subjects | |
Online Access | Get full text |
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Summary: | The temporal evolution of electron density in a nanosecond pulsed argon microplasma is measured using a combination of Stark broadening and the optical emission line-ratio method. In the initial discharge period (0-100 ns), the electron density can reach as high as ∼1018 cm−3. It decreases to ∼1017-1016 cm−3 in the early afterglow period (100 ns-1 µs after the ignition) and ∼1016-1013 cm−3 in the late afterglow period (1-20 µs). It is demonstrated that the optical emission spectroscopy (OES) line-ratio method can obtain the electron density in the range 1013-1016 cm−3, while in the range 1016-1018 cm−3, the Stark broadening technique with argon 2p-1s lines (in Paschen's notation) is a better choice. These results are in good agreement with those from the Stark broadening technique with hydrogen Balmer lines. Finally, a possible mechanism for such a density evolution is briefly discussed. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0022-3727 1361-6463 |
DOI: | 10.1088/0022-3727/45/29/295201 |