Structural and Mechanical Properties of Zr-Si-N Coatings Deposited by Arc Evaporation at Different Substrate Bias Voltages

• Published in: Journal of materials engineering and performance Vol. 27; no. 8; pp. 3940 - 3950
• Main Authors: Warcholinski, B., Kuznetsova, T. A., Gilewicz, A., Zubar, T. I., Lapitskaya, V. A., Chizhik, S. A., Komarov, A. I., Komarova, V. I., Kuprin, A. S., Ovcharenko, V. D., Goltvyanytsya, V. S.
• Format: Journal Article
• Language: English
• Published: New York Springer US 01.08.2018
• Subjects: Characterization and Evaluation of Materials; Chemistry and Materials Science; Corrosion and Coatings; Engineering Design; Materials Science; Quality Control; Reliability; Safety and Risk; Tribology; AFM; arc evaporation; grain size; microstructure; roughness Ra; Zr-Si-N
• ISSN: 1059-9495; 1544-1024
• DOI: 10.1007/s11665-018-3483-7

ZrN and Zr-Si-N coatings were formed using vacuum-arc plasma fluxes deposition system at the substrate bias voltage (U B ) ranged from − 50 to − 220 V on HS6-5-2 steel substrates. The structural, mechanical and tribological properties were characterized using x-ray diffraction, atomic force microscopy, scanning electron microscopy, optical microscopy, nanoindentation and ball-on-disk test. The surface roughness parameter Ra of ZrN coatings is lower than Zr-Si-N coatings. Both roughness Ra of Zr-Si-N coatings and the number of surface defects with mainly small dimensions to 1 µm decrease with increasing negative substrate bias voltage. The addition of silicon to ZrN significantly reduces the crystallite size, from about 18.3 nm for ZrN coating to 6.4 nm for Zr-Si-N coating both deposited at the same U B  = − 100 V and 7.8 nm for U B  = − 150 V. The hardness of Zr-Si-N coatings increases to about 30 GPa with the increase in negative substrate bias voltage (U B  = − 220 V). Adhesion of the coatings tested is high, and critical load is above 80 N and reduces with U B increase. Coefficient of friction determined using AFM shows similar trend as surface roughness in microscale.