Improvement of Compact Electron-Beam-Excited Plasma Source for Increased Producible Plasma Density

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 48; no. 7R; p. 76001
Main Authors Ichiki, Ryuta, Hara, Tamio
Format Journal Article
LanguageEnglish
Published 01.07.2009
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.48.076001