Preparation of rod shaped nickel oxide thin films by a novel and cost effective nebulizer technique

Nickel oxide thin films have been deposited from 0.3M aqueous solution of nickel chloride onto microscopic glass substrates, which were chemically and ultrasonically cleaned before coating. The film depositions are carried out with 1ml, 2ml, 5ml and 10ml. The substrate temperature, spray rate, dista...

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Bibliographic Details
Published inMaterials science in semiconductor processing Vol. 27; pp. 1042 - 1049
Main Authors Gowthami, V., Meenakshi, M., Perumal, P., Sivakuma, R., Sanjeeviraja, C.
Format Journal Article
LanguageEnglish
Published Kidlington Elsevier Ltd 01.11.2014
Elsevier
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Summary:Nickel oxide thin films have been deposited from 0.3M aqueous solution of nickel chloride onto microscopic glass substrates, which were chemically and ultrasonically cleaned before coating. The film depositions are carried out with 1ml, 2ml, 5ml and 10ml. The substrate temperature, spray rate, distance between substrate and nozzle and air flow rate were fixed at 400°C, 0.5ml per min, ~7cm and 1.2kg/cm2 respectively after optimization of these deposition parameters. The effect of the volume of sprayed solution on structural, optical properties and surface morphology of the films was investigated using X-ray diffractrometer, UV–vis–NIR spectrometer, photoluminescence spectrometer, Raman spectrometer, scanning electron microscope and liner four probe resistivity set-up respectively. The diffraction peak along (111) plane at 2θ=37.2° for all the films was observed. Besides this other low intensity peaks were observed along (200) and (220) Miller planes. The peaks indicated that this corresponds to cubic structure of NiO thin films. Optical transmittance and absorption spectra are recorded using a UV–vis–NIR spectrometer. When the quantity of sprayed volume increased, the transmittance decreased, consequently the band-gap energy wanes from 3.64 to 3.21eV. From PL spectra, the samples show sharp and strong UV emission around 376nm corresponding to the near band-edge emission of NiO under excitation of 275nm. The surface morphology of the films was carried out using SEM to find the smooth, uniform and pin hole free surface. The composition of the films was estimated using EDAX spectrum of the films. The resistivity results show that the activation energy decreases with increase in the sprayed volume solution.
ISSN:1369-8001
1873-4081
DOI:10.1016/j.mssp.2014.09.014