Tensile measurement of single crystal gallium nitride nanowires on MEMS test stages
This paper reports direct tensile tests on n-type (Si-doped) gallium nitride single crystal nanowires 1 1 Contribution of NIST, an agency of the U.S. government, not subject to copyright. that were grown by nitrogen plasma-assisted molecular beam epitaxy and which are essentially free of defects and...
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Published in | Sensors and actuators. A. Physical. Vol. 166; no. 2; pp. 177 - 186 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
01.04.2011
|
Subjects | |
Online Access | Get full text |
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Summary: | This paper reports direct tensile tests on n-type (Si-doped) gallium nitride single crystal nanowires
1
1
Contribution of NIST, an agency of the U.S. government, not subject to copyright.
that were grown by nitrogen plasma-assisted molecular beam epitaxy and which are essentially free of defects and residual strain. Nanowires were integrated with actuated, active microelectromechanical (MEMS) devices using dielectrophoresis-driven self-assembly and platinum-carbon clamps created using a gallium focused ion beam. For one nanowire, failure strain of 0.042
±
0.011 was found. Most nanowire specimens appeared to demonstrate tensile strength in the range of 4.0
±
1.7
GPa to 7.5
±
3.4
GPa. Failure modes included clamp failure, transverse (nanowire
c-plane) fractures, and insufficient force from the MEMS test actuator. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0924-4247 1873-3069 |
DOI: | 10.1016/j.sna.2010.04.002 |