Ultrafast multi-layer subtractive patterning

Subtractive femtosecond laser machining using multiple pulses with different spatial intensity profiles centred on the same position on a sample has been used to fabricate surface relief structuring. A digital micromirror device was used as an intensity spatial light modulator, with a fixed position...

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Bibliographic Details
Published inOptics express Vol. 26; no. 9; pp. 11928 - 11933
Main Authors Heath, Daniel J, Rana, Taimoor H, Bapty, Rupert A, Grant-Jacob, James A, Xie, Yunhui, Eason, Robert W, Mills, Ben
Format Journal Article
LanguageEnglish
Published United States 30.04.2018
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Summary:Subtractive femtosecond laser machining using multiple pulses with different spatial intensity profiles centred on the same position on a sample has been used to fabricate surface relief structuring. A digital micromirror device was used as an intensity spatial light modulator, with a fixed position relative to the sample, to ensure optimal alignment between successive masks. Up to 50 distinct layers, 335 nm lateral spatial resolution and 2.6 µm maximum depth structures were produced. The lateral dimensions of the structures are approximately 40 µm. Surface relief structuring is shown to match intended depth profiles in a nickel substrate, and highly repeatable stitching of identical features in close proximity is also demonstrated.
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ISSN:1094-4087
1094-4087
DOI:10.1364/OE.26.011928