High-Spatial-Resolution Low-Energy Electron Beam X-Ray Microanalysis

• Published in: Mikrochimica acta (1966) Vol. 132; no. 2-4; pp. 113 - 128
• Main Authors: Barkshire, Ian, Karduck, Peter, Rehbach, Werner P., Richter, Silvia
• Format: Journal Article
• Language: English
• Published: Heidelberg Springer Nature B.V 01.01.2000
• Subjects: Electron beams; Microscopes; Reduction; Spatial resolution

Performing X-ray microanalysis at beam energies lower than those conventionally used (< 10 keV) is known to significantly improve the spatial resolution for compositional analysis. However, the reduction in the beam energy which reduces the X-ray interaction diameter also introduces analytical di...