High-Spatial-Resolution Low-Energy Electron Beam X-Ray Microanalysis

Performing X-ray microanalysis at beam energies lower than those conventionally used (< 10 keV) is known to significantly improve the spatial resolution for compositional analysis. However, the reduction in the beam energy which reduces the X-ray interaction diameter also introduces analytical di...

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Bibliographic Details
Published inMikrochimica acta (1966) Vol. 132; no. 2-4; pp. 113 - 128
Main Authors Barkshire, Ian, Karduck, Peter, Rehbach, Werner P., Richter, Silvia
Format Journal Article
LanguageEnglish
Published Heidelberg Springer Nature B.V 01.01.2000
Subjects
Electron beams
Microscopes
Reduction
Spatial resolution
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Summary:Performing X-ray microanalysis at beam energies lower than those conventionally used (< 10 keV) is known to significantly improve the spatial resolution for compositional analysis. However, the reduction in the beam energy which reduces the X-ray interaction diameter also introduces analytical difficulties and constraints which can diminish the overall analytical performance. This paper critically assesses the capabilities and limitations of performing low beam energy, high spatial resolution X-ray microanalysis. The actual improvement in the spatial resolution and the reduction in the X-ray yield are explored as the beam energy is reduced. The consequences for spectral interpretation, quantitative analysis and imaging due to the lower X-ray yield and the increased occurrence of X-ray line overlaps are discussed in the context of currently available instrumentation.
ISSN:0026-3672
1436-5073
DOI:10.1007/s006040050052