Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions

An ultra-sensitive angle sensor employing single-cell photodiodes, which allows tighter focusing leading to a higher angular resolution better than 0.001 arc-second, has been designed based on laser autocollimation. Aiming to investigate the influences of spherical aberrations in the optical system...

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Bibliographic Details
Published inOptics express Vol. 24; no. 3; pp. 2788 - 2805
Main Authors Shimizu, Yuki, Tan, Siew Leng, Murata, Dai, Maruyama, Taiji, Ito, So, Chen, Yuan-Liu, Gao, Wei
Format Journal Article
LanguageEnglish
Published United States 08.02.2016
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Summary:An ultra-sensitive angle sensor employing single-cell photodiodes, which allows tighter focusing leading to a higher angular resolution better than 0.001 arc-second, has been designed based on laser autocollimation. Aiming to investigate the influences of spherical aberrations in the optical system on the sensor sensitivity, an optical model has been established based on wave optics. Computer simulation has been carried out by using the model, and its feasibility has been verified in experiments. In addition, a prototype optical angle sensor has been designed in a compact size of 100 mm × 150 mm, and its measurement resolution has been verified in experiments.
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ISSN:1094-4087
1094-4087
DOI:10.1364/OE.24.002788