Dual-wavelength digital holography with a single low-coherence light source

We propose a measurement system using dual-wavelength digital holography and low-coherence interferometry to measure micro- and nanostructure surface heights. To achieve an extended axial step-measurement range and better image quality, a single light-emitting diode generates two distinct light sour...

Full description

Saved in:
Bibliographic Details
Published inOptics express Vol. 24; no. 16; pp. 18408 - 18416
Main Authors Jeon, Sungbin, Cho, Janghyun, Jin, Ji-Nan, Park, No-Cheol, Park, Young-Pil
Format Journal Article
LanguageEnglish
Published United States 08.08.2016
Online AccessGet full text

Cover

Abstract We propose a measurement system using dual-wavelength digital holography and low-coherence interferometry to measure micro- and nanostructure surface heights. To achieve an extended axial step-measurement range and better image quality, a single light-emitting diode generates two distinct light sources by filtering different center wavelengths and narrower bandwidths. The system can measure surface profile with higher step heights and lower speckle noise in a large field-of-view. Using single-source lighting and a simple configuration, the method supports compactly configured and lower-cost surface-topography measurement systems applicable in various fields. Experimental results for a standard step sample verify the system's performance.
AbstractList We propose a measurement system using dual-wavelength digital holography and low-coherence interferometry to measure micro- and nanostructure surface heights. To achieve an extended axial step-measurement range and better image quality, a single light-emitting diode generates two distinct light sources by filtering different center wavelengths and narrower bandwidths. The system can measure surface profile with higher step heights and lower speckle noise in a large field-of-view. Using single-source lighting and a simple configuration, the method supports compactly configured and lower-cost surface-topography measurement systems applicable in various fields. Experimental results for a standard step sample verify the system's performance.
Author Jin, Ji-Nan
Park, No-Cheol
Cho, Janghyun
Park, Young-Pil
Jeon, Sungbin
Author_xml – sequence: 1
  givenname: Sungbin
  surname: Jeon
  fullname: Jeon, Sungbin
– sequence: 2
  givenname: Janghyun
  surname: Cho
  fullname: Cho, Janghyun
– sequence: 3
  givenname: Ji-Nan
  surname: Jin
  fullname: Jin, Ji-Nan
– sequence: 4
  givenname: No-Cheol
  surname: Park
  fullname: Park, No-Cheol
– sequence: 5
  givenname: Young-Pil
  surname: Park
  fullname: Park, Young-Pil
BackLink https://www.ncbi.nlm.nih.gov/pubmed/27505804$$D View this record in MEDLINE/PubMed
BookMark eNpNkDtPwzAUhS1URB-wMaOMDKTYiRPbI2rLQ1TqArPlONdJkBsXO6HqvyeoBTHdc48-neGbolHrWkDomuA5SXN6v1nNEzrHhFPMz9CEYEHjIbLRvzxG0xA-MCaUCXaBxgnLcMYxnaDXZa9svFdfYKGtujoqm6rplI1qZ13l1a4-RPtm6FUUmrayEFm3j7WrwUOrh6-p6i4KrvcaLtG5UTbA1enO0Pvj6m3xHK83Ty-Lh3Ws00R0cSZIzgwGlRpGISu0yiDPKBhcFgUxKtdYMMaVSRJRKp4VpjAl6IKUHDTDIp2h2-PuzrvPHkInt03QYK1qwfVBEk4wz1ku6IDeHVHtXQgejNz5Zqv8QRIsf_TJzUomVB71DfjNabkvtlD-wb--0m_t-W27
CitedBy_id crossref_primary_10_1364_OE_25_024512
crossref_primary_10_1364_OL_44_004626
crossref_primary_10_1080_09500340_2023_2194454
crossref_primary_10_1364_AO_395001
crossref_primary_10_3390_jimaging8070196
crossref_primary_10_1364_AO_414941
crossref_primary_10_1364_OE_521437
crossref_primary_10_1016_j_measurement_2022_112325
crossref_primary_10_1016_j_optlastec_2018_10_053
crossref_primary_10_1088_1674_1056_abf348
crossref_primary_10_1364_OE_440980
crossref_primary_10_1016_j_ijleo_2020_165953
crossref_primary_10_1016_j_optlaseng_2020_106184
crossref_primary_10_1364_AO_424666
crossref_primary_10_1364_OL_42_005082
crossref_primary_10_1364_AO_56_00F205
crossref_primary_10_1364_AO_446251
crossref_primary_10_1117_1_OE_63_6_064102
crossref_primary_10_1016_j_optcom_2022_127965
crossref_primary_10_1364_AO_394757
crossref_primary_10_1364_OL_432135
crossref_primary_10_1088_2040_8986_aa8b8f
crossref_primary_10_1038_s41377_019_0131_4
crossref_primary_10_1016_j_optlaseng_2021_106629
crossref_primary_10_1364_OL_43_003449
crossref_primary_10_1364_OL_43_003526
crossref_primary_10_1364_OL_44_005025
crossref_primary_10_1364_AO_507354
crossref_primary_10_1364_OE_24_027791
crossref_primary_10_1016_j_optlaseng_2019_04_013
crossref_primary_10_3389_fphy_2022_822714
crossref_primary_10_1016_j_optlaseng_2022_107080
crossref_primary_10_1088_2631_8695_acf97e
crossref_primary_10_1364_OE_498121
crossref_primary_10_1038_lsa_2017_55
crossref_primary_10_1364_OE_26_002123
crossref_primary_10_1364_OL_43_000739
crossref_primary_10_35848_1347_4065_ab9c41
crossref_primary_10_1364_OE_26_027305
crossref_primary_10_1016_j_optlaseng_2023_107565
crossref_primary_10_1088_2040_8986_aa8887
crossref_primary_10_1088_2515_7647_abfc59
Cites_doi 10.1088/2040-8978/16/12/125408
10.1117/12.763291
10.1038/nphoton.2012.90
10.1364/OL.24.000291
10.1002/sia.2815
10.1063/1.1777796
10.1364/OL.38.005196
10.1364/AO.38.002204
10.1364/JOSAA.23.003177
10.1364/JOSAA.25.003013
10.1364/AO.51.000191
10.1364/OL.25.000212
10.1117/1.602338
10.1364/AO.38.007085
10.1364/OE.15.007231
10.1364/AO.50.005834
10.1117/12.260653
10.1364/AO.45.000451
10.1364/OL.26.000157
10.1364/BOE.2.002721
10.1016/j.optlaseng.2008.03.007
10.1364/OL.39.002374
10.1364/OL.22.001268
10.1364/AO.39.004070
10.1364/OL.33.000744
10.1117/1.JBO.19.4.046022
10.1109/5.488745
10.1364/AO.54.001839
10.1364/AO.46.006623
ContentType Journal Article
DBID NPM
AAYXX
CITATION
7X8
DOI 10.1364/OE.24.018408
DatabaseName PubMed
CrossRef
MEDLINE - Academic
DatabaseTitle PubMed
CrossRef
MEDLINE - Academic
DatabaseTitleList PubMed
MEDLINE - Academic
Database_xml – sequence: 1
  dbid: NPM
  name: PubMed
  url: https://proxy.k.utb.cz/login?url=http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed
  sourceTypes: Index Database
DeliveryMethod fulltext_linktorsrc
Discipline Physics
EISSN 1094-4087
EndPage 18416
ExternalDocumentID 10_1364_OE_24_018408
27505804
Genre Journal Article
GroupedDBID ---
123
29N
2WC
8SL
AAWJZ
ACGFO
ADBBV
AENEX
AKGWG
ALMA_UNASSIGNED_HOLDINGS
ATHME
AYPRP
AZSQR
AZYMN
BAWUL
BCNDV
CS3
DIK
DSZJF
DU5
E3Z
EBS
EJD
F5P
GROUPED_DOAJ
GX1
KQ8
M~E
NPM
OFLFD
OK1
OPJBK
OPLUZ
P2P
RNS
ROL
ROP
ROS
TR2
TR6
XSB
AAYXX
CITATION
7X8
ID FETCH-LOGICAL-c329t-59167f0ea3f74e5bca5e654ef0dbb1fa6c09778af229da85bfbfdecb1d8ec7093
ISSN 1094-4087
IngestDate Fri Apr 12 02:58:47 EDT 2024
Wed Aug 07 14:09:59 EDT 2024
Fri May 24 00:06:27 EDT 2024
IsDoiOpenAccess false
IsOpenAccess true
IsPeerReviewed true
IsScholarly true
Issue 16
Language English
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c329t-59167f0ea3f74e5bca5e654ef0dbb1fa6c09778af229da85bfbfdecb1d8ec7093
Notes ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
OpenAccessLink https://doi.org/10.1364/oe.24.018408
PMID 27505804
PQID 1810867694
PQPubID 23479
PageCount 9
ParticipantIDs proquest_miscellaneous_1810867694
crossref_primary_10_1364_OE_24_018408
pubmed_primary_27505804
PublicationCentury 2000
PublicationDate 2016-Aug-08
2016-08-08
20160808
PublicationDateYYYYMMDD 2016-08-08
PublicationDate_xml – month: 08
  year: 2016
  text: 2016-Aug-08
  day: 08
PublicationDecade 2010
PublicationPlace United States
PublicationPlace_xml – name: United States
PublicationTitle Optics express
PublicationTitleAlternate Opt Express
PublicationYear 2016
References Rappaz (oe-24-16-18408-R30) 2008; 33
Arimoto (oe-24-16-18408-R5) 2001; 26
Abdul-Rahman (oe-24-16-18408-R7) 2007; 46
Kühn (oe-24-16-18408-R26) 2008; 6861
Min (oe-24-16-18408-R9) 2012; 51
Kim (oe-24-16-18408-R3) 2015; 54
Awatsuji (oe-24-16-18408-R28) 2004; 85
Iwai (oe-24-16-18408-R27) 1996; 84
Doblas (oe-24-16-18408-R2) 2014; 19
Redding (oe-24-16-18408-R18) 2012; 6
Indebetouw (oe-24-16-18408-R19) 2000; 25
Wagner (oe-24-16-18408-R8) 2000; 39
Wada (oe-24-16-18408-R16) 2008; 25
Yamaguchi (oe-24-16-18408-R14) 1997; 22
Parshall (oe-24-16-18408-R25) 2006; 45
Yokota (oe-24-16-18408-R4) 2011; 50
Man (oe-24-16-18408-R6) 2015; 54
Cuche (oe-24-16-18408-R20) 1996; 2927
Lee (oe-24-16-18408-R10) 2014; 39
Kemper (oe-24-16-18408-R11) 2008; 46
Guo (oe-24-16-18408-R22) 2014; 16
Takaki (oe-24-16-18408-R15) 1999; 38
Colomb (oe-24-16-18408-R24) 2006; 23
Dubois (oe-24-16-18408-R21) 1999; 38
Cuche (oe-24-16-18408-R1) 1999; 24
Hong (oe-24-16-18408-R12) 2013; 38
Cuche (oe-24-16-18408-R13) 2000; 39
Matsuura (oe-24-16-18408-R23) 2008; 40
Kühn (oe-24-16-18408-R17) 2007; 15
Lee (oe-24-16-18408-R29) 2011; 2
References_xml – volume: 16
  start-page: 125408
  year: 2014
  ident: oe-24-16-18408-R22
  publication-title: J. Opt.
  doi: 10.1088/2040-8978/16/12/125408
  contributor:
    fullname: Guo
– volume: 6861
  start-page: 68610J
  year: 2008
  ident: oe-24-16-18408-R26
  publication-title: Proc. SPIE
  doi: 10.1117/12.763291
  contributor:
    fullname: Kühn
– volume: 6
  start-page: 355
  year: 2012
  ident: oe-24-16-18408-R18
  publication-title: Nat. Photonics
  doi: 10.1038/nphoton.2012.90
  contributor:
    fullname: Redding
– volume: 24
  start-page: 291
  year: 1999
  ident: oe-24-16-18408-R1
  publication-title: Opt. Lett.
  doi: 10.1364/OL.24.000291
  contributor:
    fullname: Cuche
– volume: 40
  start-page: 1028
  year: 2008
  ident: oe-24-16-18408-R23
  publication-title: Surf. Interface Anal.
  doi: 10.1002/sia.2815
  contributor:
    fullname: Matsuura
– volume: 54
  start-page: 09M
  year: 2015
  ident: oe-24-16-18408-R3
  publication-title: Jpn. J. Appl. Phys.
  contributor:
    fullname: Kim
– volume: 85
  start-page: 1069
  year: 2004
  ident: oe-24-16-18408-R28
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.1777796
  contributor:
    fullname: Awatsuji
– volume: 38
  start-page: 5196
  year: 2013
  ident: oe-24-16-18408-R12
  publication-title: Opt. Lett.
  doi: 10.1364/OL.38.005196
  contributor:
    fullname: Hong
– volume: 38
  start-page: 2204
  year: 1999
  ident: oe-24-16-18408-R15
  publication-title: Appl. Opt.
  doi: 10.1364/AO.38.002204
  contributor:
    fullname: Takaki
– volume: 23
  start-page: 3177
  year: 2006
  ident: oe-24-16-18408-R24
  publication-title: J. Opt. Soc. Am. A
  doi: 10.1364/JOSAA.23.003177
  contributor:
    fullname: Colomb
– volume: 25
  start-page: 3013
  year: 2008
  ident: oe-24-16-18408-R16
  publication-title: J. Opt. Soc. Am. A
  doi: 10.1364/JOSAA.25.003013
  contributor:
    fullname: Wada
– volume: 51
  start-page: 191
  year: 2012
  ident: oe-24-16-18408-R9
  publication-title: Appl. Opt.
  doi: 10.1364/AO.51.000191
  contributor:
    fullname: Min
– volume: 25
  start-page: 212
  year: 2000
  ident: oe-24-16-18408-R19
  publication-title: Opt. Lett.
  doi: 10.1364/OL.25.000212
  contributor:
    fullname: Indebetouw
– volume: 39
  start-page: 79
  year: 2000
  ident: oe-24-16-18408-R8
  publication-title: Opt. Eng.
  doi: 10.1117/1.602338
  contributor:
    fullname: Wagner
– volume: 38
  start-page: 7085
  year: 1999
  ident: oe-24-16-18408-R21
  publication-title: Appl. Opt.
  doi: 10.1364/AO.38.007085
  contributor:
    fullname: Dubois
– volume: 15
  start-page: 7231
  year: 2007
  ident: oe-24-16-18408-R17
  publication-title: Opt. Express
  doi: 10.1364/OE.15.007231
  contributor:
    fullname: Kühn
– volume: 50
  start-page: 5834
  year: 2011
  ident: oe-24-16-18408-R4
  publication-title: Appl. Opt.
  doi: 10.1364/AO.50.005834
  contributor:
    fullname: Yokota
– volume: 2927
  start-page: 61
  year: 1996
  ident: oe-24-16-18408-R20
  publication-title: Proc. SPIE
  doi: 10.1117/12.260653
  contributor:
    fullname: Cuche
– volume: 45
  start-page: 451
  year: 2006
  ident: oe-24-16-18408-R25
  publication-title: Appl. Opt.
  doi: 10.1364/AO.45.000451
  contributor:
    fullname: Parshall
– volume: 26
  start-page: 157
  year: 2001
  ident: oe-24-16-18408-R5
  publication-title: Opt. Lett.
  doi: 10.1364/OL.26.000157
  contributor:
    fullname: Arimoto
– volume: 2
  start-page: 2721
  year: 2011
  ident: oe-24-16-18408-R29
  publication-title: Biomed. Opt. Express
  doi: 10.1364/BOE.2.002721
  contributor:
    fullname: Lee
– volume: 46
  start-page: 499
  year: 2008
  ident: oe-24-16-18408-R11
  publication-title: Opt. Lasers Eng.
  doi: 10.1016/j.optlaseng.2008.03.007
  contributor:
    fullname: Kemper
– volume: 39
  start-page: 2374
  year: 2014
  ident: oe-24-16-18408-R10
  publication-title: Opt. Lett.
  doi: 10.1364/OL.39.002374
  contributor:
    fullname: Lee
– volume: 22
  start-page: 1268
  year: 1997
  ident: oe-24-16-18408-R14
  publication-title: Opt. Lett.
  doi: 10.1364/OL.22.001268
  contributor:
    fullname: Yamaguchi
– volume: 39
  start-page: 4070
  year: 2000
  ident: oe-24-16-18408-R13
  publication-title: Appl. Opt.
  doi: 10.1364/AO.39.004070
  contributor:
    fullname: Cuche
– volume: 33
  start-page: 744
  year: 2008
  ident: oe-24-16-18408-R30
  publication-title: Opt. Lett.
  doi: 10.1364/OL.33.000744
  contributor:
    fullname: Rappaz
– volume: 19
  start-page: 046022
  year: 2014
  ident: oe-24-16-18408-R2
  publication-title: J. Biomed. Opt.
  doi: 10.1117/1.JBO.19.4.046022
  contributor:
    fullname: Doblas
– volume: 84
  start-page: 765
  year: 1996
  ident: oe-24-16-18408-R27
  publication-title: Proc. IEEE
  doi: 10.1109/5.488745
  contributor:
    fullname: Iwai
– volume: 54
  start-page: 1839
  year: 2015
  ident: oe-24-16-18408-R6
  publication-title: Appl. Opt.
  doi: 10.1364/AO.54.001839
  contributor:
    fullname: Man
– volume: 46
  start-page: 6623
  year: 2007
  ident: oe-24-16-18408-R7
  publication-title: Appl. Opt.
  doi: 10.1364/AO.46.006623
  contributor:
    fullname: Abdul-Rahman
SSID ssj0014797
Score 2.4896467
Snippet We propose a measurement system using dual-wavelength digital holography and low-coherence interferometry to measure micro- and nanostructure surface heights....
SourceID proquest
crossref
pubmed
SourceType Aggregation Database
Index Database
StartPage 18408
Title Dual-wavelength digital holography with a single low-coherence light source
URI https://www.ncbi.nlm.nih.gov/pubmed/27505804
https://search.proquest.com/docview/1810867694
Volume 24
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3da9swEBdbx2AvY99NtxUPtqfgzLIl2X4cWUrp2mSwBPJmJFmOA8YOq0O7Pexv3-kjjjs66PYihED3cL_jdKf7Qui9CDAPEi78WKeKE8FCX7Ai8mNOOMaKcxHoQuGLKTtdkLMlXe5muLvqklaM5M9b60r-B1U4A1x1lew_INsRhQPYA76wAsKw3gnjz1te-Vdcz46oV205zNertSlu7DpRu9q1of4RqNSwaq582ZSutWylHfOh_b7vG6mzjendrK43XX6GSTG0AfpvoB7EupOpcWljN7xelT-23fGZm_K19qd7-fvqErOnjT8uVVP1vxwwMwlvVksqqybBKQTP0z2VTo_aWuidvPS1ovYik94Ti3Ws81b9HTECTJ9NRiEZBb1r_TbZ01l2sjg_z-aT5fw-ehDGKdW5nBe_Jl34iMRp7KocgOLHPr2b9sdfnApjXMyfoMfOK_A-WYifonuqfoYemuxcefkcffkDaM8B7e2B9jTQHvcs0N4NoD0DtGeBfoEWJ5P5-NR3UzB8GYVp61Mw4OMiUDwqYqKokJwqRokqglwIXHAmA7DhE16EYZrzhIpCFLmSAueJknGQRi_RQd3U6hB5mEosFcFKSEZgL_JUiAIMyIAqXjA8QB92vMk2ttlJZiKejGSzSRaSzPJwgN7tGJeBNtIhJl6rZnuZgb0IPnLMUjJAryxHO0p6kgBNAnJ0h9uv0aO94L1BB-33rXoL1l8rjs2vybHB-zd_KGAR
link.rule.ids 315,786,790,870,27955,27956
linkProvider ISSN International Centre
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Dual-wavelength+digital+holography+with+a+single+low-coherence+light+source&rft.jtitle=Optics+express&rft.au=Jeon%2C+Sungbin&rft.au=Cho%2C+Janghyun&rft.au=Jin%2C+Ji-Nan&rft.au=Park%2C+No-Cheol&rft.date=2016-08-08&rft.eissn=1094-4087&rft.volume=24&rft.issue=16&rft.spage=18408&rft.epage=18416&rft_id=info:doi/10.1364%2FOE.24.018408&rft.externalDBID=NO_FULL_TEXT
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1094-4087&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1094-4087&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1094-4087&client=summon