Dual-wavelength digital holography with a single low-coherence light source

We propose a measurement system using dual-wavelength digital holography and low-coherence interferometry to measure micro- and nanostructure surface heights. To achieve an extended axial step-measurement range and better image quality, a single light-emitting diode generates two distinct light sour...

Full description

Saved in:
Bibliographic Details
Published inOptics express Vol. 24; no. 16; pp. 18408 - 18416
Main Authors Jeon, Sungbin, Cho, Janghyun, Jin, Ji-Nan, Park, No-Cheol, Park, Young-Pil
Format Journal Article
LanguageEnglish
Published United States 08.08.2016
Online AccessGet full text

Cover

More Information
Summary:We propose a measurement system using dual-wavelength digital holography and low-coherence interferometry to measure micro- and nanostructure surface heights. To achieve an extended axial step-measurement range and better image quality, a single light-emitting diode generates two distinct light sources by filtering different center wavelengths and narrower bandwidths. The system can measure surface profile with higher step heights and lower speckle noise in a large field-of-view. Using single-source lighting and a simple configuration, the method supports compactly configured and lower-cost surface-topography measurement systems applicable in various fields. Experimental results for a standard step sample verify the system's performance.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.24.018408