Atomic Layer Fluorination of Highly Oriented Pyrolytic Graphite using Hyperthermal Atomic Fluorine Beam

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Bibliographic Details
Published inApplied physics express Vol. 2; p. 66002
Main Authors Tagawa, Masahito, Yokota, Kumiko, Maeda, Ken-ichi, Yoshigoe, Akitaka, Teraoka, Yuden
Format Journal Article
LanguageEnglish
Published 01.06.2009
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ISSN:1882-0778
1882-0786
DOI:10.1143/APEX.2.066002