A high-accuracy and convenient figure measurement system for large convex lens

We present a novel optical configuration of a phase-shifting interferometer for high-accuracy figure metrology of large dioptric convex spherical surfaces. The conformation and design considerations according to measurement accuracy, practicability, and system errors analysis are described. More in...

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Bibliographic Details
Published inOptics express Vol. 20; no. 10; pp. 10761 - 10775
Main Authors Tian, Zhihui, Yang, Wang, Sui, Yongxin, Kang, Yusi, Liu, Weiqi, Yang, Huaijiang
Format Journal Article
LanguageEnglish
Published United States 07.05.2012
Subjects
Equipment Design
Interferometry
Lasers
Lenses
Models, Statistical
Optics and Photonics - instrumentation
Optics and Photonics - methods
Reproducibility of Results
Surface Properties
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Summary:We present a novel optical configuration of a phase-shifting interferometer for high-accuracy figure metrology of large dioptric convex spherical surfaces. The conformation and design considerations according to measurement accuracy, practicability, and system errors analysis are described. More in detail, we show the design principle and methods for the crucial parts. Some are expounded upon with examples for thorough understanding. The measurement procedures and the alignment approaches are also described. Finally, a verification experiment is further presented to verify our theoretical design. This system gives full-aperture and high-precision surface testing while maintaining relatively low cost and convenient operation.
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ISSN:1094-4087
1094-4087
DOI:10.1364/OE.20.010761